Title of Invention

A MICROELECTRONIC PACKAGE AND METHOD OF FABRICATION THEREFOR.

Abstract A microelectronic package including a microelectronic die disposed within an opening in a microelectronic packaging core, wherein an encapsulation material is disposed within portions of the opening not occupied by the microelectronic die. Build-up layers of dielectric materials and conductive traces are then fabricated on the microelectronic die, the encapsulant material, and the microelectronic package core to form the microelectronic package .
Full Text A MICROELECTRONIC PACKAGE AND
METHOD OF FABRICATION THEREFOR
BACKGROUND OF THE INVENTION
Field of the Invention: The present invention relates to a microelectronic package and
method of fabrication therefor, and generally to apparatus and processes for packaging
microelectronic dice. In particular, the present invention relates to a packaging
technology that, encapsulates a microelectronic die within a microelectronic package
core.
State of the Art: Higher performance, lower cost, increased miniaturization of
integrated circuit components, and greater packaging density of integrated circuits are
ongoing goals of the computer industry. As these goals are achieved, microelectronic
dice become smaller. Of course, the goal of greater packaging density requires that the
entire microelectronic die package be equal to or only slightly larger (about 10% to
30%) than the size of the microelectronic die itself. Such microelectronic die packaging
is called a "chip scale packaging" or "CSP".
As shown in FIG. 20, true CSP involves fabricating build-up layers directly on an
active surface 204 of a microelectronic die 202. The build-up layers may include a
dielectric layer 206 disposed on the active surface 204. Conductive traces 208 may be
formed on the dielectric layer 206, wherein a portion of each conductive trace 208
contacts at least one contact 212 on the active surface 204. External contacts, such as
solder balls or conductive pins for contact with an external component (not shown), may
be fabricated to electrically contact at least one conductive trace 208. FIG. 20 illustrates
the external contacts as solder balls 214 which are surrounded by a solder mask material
216 on the dielectric layer 206. However in such true CSP, the surface area provided by
the microelectronic die active surface 204 generally does not provide enough surface for
all of the external contacts needed to contact the external component (not shown) for
certain types of microelectronic dice (e.g., logic).
Additional surface area can be provided with the use of an interposer, such as a
substrate (substantially rigid material) or a flex component (substantially flexible
material). FIG. 21 illustrates a substrate interposer 222 having a microelectronic die 224
attached to and in electrical contact with a first surface 226 of the substrate interposer
222 through small solder balls 228. The small solder balls 228 extend between contacts
232 on the microelectronic die 224 and conductive traces 234 on the substrate interposer
first surface 226. The conductive traces 234 are in discrete electrical contact with bond
pads 236 on a second surface 238 of the substrate interposer 222 through vias 242 that
extend through the substrate interposer 222. External contacts 244 are formed on the
bond pads 236 (shown as solder balls). The external contacts 244 are utilized to achieve
electrical communication between the microelectronic die 224 and an external electrical
system (not shown).
The use of the substrate interposer 222 requires number of processing steps, which
increases the cost of the package. Additionally, the use of the small solder balls 228
presents crowding problems which can result in shorting between the small solder balls
228 and can present difficulties in inserting underfill material between the
microelectronic die 224 and the substrate interposer 222 to prevent contamination and to
increase mechanical reliability. Furthermore, necessity of having two sets of solder balls
(i.e., small solder balls 228 and external contacts 244) to achieve connection between the
microelectronic die 224 and the external electrical system decreases the overall
performance of the microelectronic die package.
Therefore, it would be advantageous to develop new apparatus and techniques to provide
additional surface area to form traces for use in CSP applications and eliminate the necessity of
the substrate interposer.
Accordingly, the present invention provides a microelectronic package, comprising: a
microelectronic package core having a first surface and an opposing second surface, said
microelectronic package core having at least one opening defined therein extending from said
microelectronic package core first surface to said microelectronic package core second surface;
at least one microelectronic die disposed within said at least one opening, said at least one
microelectronic die having an active surface; and an encapsulation material adhering said
microelectronic package core to said at least one microelectronic die.
The present invention also provides a method of fabricating a microelectronic package,
said method comprising the steps of: providing a microelectronic package core having a first
surface and an opposing second surface, said microelectronic package core having at least one
opening defined therein extending from said microelectronic package core first surface to said
microelectronic package core second surface; disposing at least one microelectronic die within
said at least one opening, said at least one microelectronic die having an active surface; and
adhering said microelectronic package core to said at least one microelectronic die with an
encapsulation material.
The present invention further provides a method of fabricating a microelectronic package,
said method comprising the steps of: providing a microelectronic package core having a first
surface and an opposing second surface, said microelectronic package core having at least one
opening defined therein extending from said microelectronic package core first surface to said
microelectronic package core second surface; abutting a protective film against said
microelectronic package core first surface, wherein said protective film spans said at least one
opening; disposing at least one microelectronic die within said at least one opening, wherein an
active surface of said microelectronic die abuts a portion of said protective film; adhering said
microelectronic package core to said at least one microelectronic die with an encapsulation
material, wherein a portion of said encapsulation material fills a portion of said opening to form at
least one encapsulation material surface abutting said protective film; and removing said
protective film.
The present invention still further provides a method of fabricating a microelectronic
package, said method comprising the steps of: providing a microelectronic package core having
a first surface and an opposing second surface, said microelectronic package core having a
plurality of openings defined therein extending from said microelectronic package core first
surface to said microelectronic package core second surface; abutting a protective film against
said microelectronic package core first surface, wherein said protective film spans said at least
one opening; disposing a plurality of microelectronic dice within corresponding openings of the
microelectronic package core, wherein active surfaces of each of said microelectronic dice abuts
a portion of said protective film; adhering said microelectronic package core to said plurality of
microelectronic dice with an encapsulation material, wherein a portion of said encapsulation
material fills a portion of said openings to form a plurality of encapsulation material surfaces
abutting said protective film; removing said protective film; and singulating each microelectronic
die by cutting through said microelectronic package core.
BRIEF DESCRIPTION OF THE ACCOMPANYING DRAWINGS
While the specification concludes with claims particularly pointing out and
distinctly claiming that which is regarded as the present invention, the advantages of this
invention can be more readily ascertained from the following description of the
invention when read in conjunction with the accompanying drawings in which:
FIG. 1 is an oblique view of a microelectronic package core, according to the
present invention;
FIG. 2 is a top plan via of a microelectronic package core having examples of
alternate microelectronic package core openings, according to the present invention;
FIG. 3 is a side cross-sectional view of a microelectronic package core abutted to a
protective film, according to the present invention;
FIG. 4 is a side cross-sectional view of microelectronic dice disposed within
openings of the microelectronic package core, which also abut the protective film,
according to the present invention;
FIG. 5 is a side cross-sectional view of the assembly of FIG. 4 after encapsulation,
according to the present invention;
FIG. 6 is a side cross-sectional view of the assembly having microelectronic dice
FIG. 7 is a side cross-sectional view of the assembly of FIG. 5 after the protective
film has been removed, according to the present invention;
FIG. 8 is a side cross-sectional view of an alternate microelectronic package core
within a microelectronic assembly, according to the present invention;
FIGs. 9-17 are side cross-sectional views of a process of forming build-up layers
on a microelectronic die, encapsulation material, and a microelectronic package core,
according to the present invention;
FIG. 18 is a side cross-sectional view of the assembly of FIG. 7 having build-up
layers and solder balls positioned thereon, according to the present invention;
FIG. 19 is a side cross-sectional view of a singulated device, according to the
present invention;
FIG. 20 is a cross-sectional view of a true CSP of a microelectronic device, as
known in the art; and
FIG. 21 is a cross-sectional view of a CSP of a microelectronic device utilizing a
substrate interposer, as known in the art.
DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENT
Although FIGs. 1-19 illustrate various views of the present invention, these figures
are not meant to portray microelectronic assemblies in precise detail. Rather, these
figures illustrate microelectronic assemblies in a manner to more clearly convey the
concepts of the present invention. Additionally, elements common between the figures
retain the same numeric designation.
The present invention includes a packaging technology that places at least one
microelectronic dice within at least one opening in a microelectronic package core and
secures the microelectronic die/dice within the opening(s) with an encapsulation
material. Build-up layers of dielectric materials and conductive traces are men
fabricated on the microelectronic die, the encapsulant material, and the microelectronic
package core to form a microelectronic package.
The technical advantage of this invention is that the present invention enables the
microelectronic package to be built around the microelectronic die. This provides
sufficient surface area to position external contacts, while eliminating the need for a
substrate interposer, as discussed above. The elimination of the substrate interposer
increases the performance of the microelectronic package by eliminating one set of
solder connections. Furthermore, the elimination of the substrate interposer increases
power delivery performance by bringing the circuitry within the microelectronic die
closer to power delivery components (such as decoupling capacitors and the like) of the
external electrical system to which the microelectronic package is attached.
FIG. 1 illustrates a microelectronic package core 102 used to fabricate a
microelectronic package. The microelectronic package core 102 preferably comprises a
substantially planar material. The material used to fabricate the microelectronic package
core 102 may include, but is not limited to, a Bisraaleimide Triazine ("BT") resin based
material, an FR4 material (a flame retarding glass/epoxy material), various polyimide
materials, ceramic material, and the like, and metallic materials (such as copper) and the
like. The microelectronic package core 102 has at least one opening 104 extending
therethrough from a first surface 106 of the microelectronic package core 102 to an
opposing second surface 108 of the microelectronic package core 102. As shown in
FIG. 2, the opening(s) 104 may be of any shape and size including, but not limited to,
rectangular/square 104a, rectangular/square with rounded corners 104b, and circular
104c. The only limitation on the size and shape of the opening(s) 104 is that they must
be appropriately sized and shaped to house a corresponding microelectronic die therein,
as will be discussed below.
FIG. 3 illustrates the microelectronic package core first surface 106 abutting a
protective film 112. The protective film 112 is preferably a substantially flexible
material, such as KaptonĀ® polyimide film (E. I. du Pont de Nemours and Company,
Wilmington, Delaware), but may be made of any appropriate material, including
metallic films. FIG. 4 illustrates microelectronic dice 114, each having an active
surface 116 and a back surface 118, placed in corresponding openings 104 of the
microelectronic package core 102. In a preferred embodiment (illustrated), the thickness
117 of the microelectronic package core 102 and the thickness 115 of the
microelectronic dice 114 are substantially equal. The microelectronic dice 114 are each
placed such mat their active surfaces 116 abut the protective film 112. The protective
film 112 may have an adhesive, such as silicone, which attaches to the microelectronic
package core first surface 106 and the microelectronic die active surface 116. This
adhesive-type film may be applied prior to placing the microelectronic die 114 and
microelectronic package core 102 in a mold or other piece of equipment used for the
encapsulation process. The protective film 112 may also be a non-adhesive film, such as
a ETFE (ethylene - tetrafluoroethylene) or TeflonĀ® film, which is held on the
microelectronic die active surface 116 and the microelectronic package core first surface
106 by an inner surface of the mold or other piece of equipment during the encapsulation
process.
The microelectronic die 114 is then encapsulated with an encapsulation material
122, such as plastics, resins, epoxies, and the like. As shown in FIG. 5, the
encapsulation material is disposed in portions of the opening(s) 104 not occupied by the
microelectronic die 114. In FIG. 6, an alternate embodiment is shown wherein the
microelectronic die thickness 115 is greater than the microelectronic package core
thickness 117. Thus, the encapsulation material covers the microelectronic package core
second surface 108 and portions of the opening(s) 104 not occupied by the
microelectronic die 114, as shown in FIG. 6.
The encapsulation of the microelectronic die 114 may be achieved by any known
process, including but not limited to transfer and compression molding, and dispensing.
The encapsulation material 122 secures the microelectronic die 114 within the
microelectronic package core 102 and provides mechanical rigidity for the resulting
structure and provides surface area for the subsequent build-up of trace layers.
After encapsulation, the protective film 112 is removed, as shown in FIG. 7, to
expose the microelectronic die active surface 116. As also shown in FIG. 7, the
encapsulation material 122 is preferably molded to be a filler for the space between the
microelectronic package core first surface 106 and the microelectronic die active surface
116. This results in at least one surface 124 that is substantially planar to the
microelectronic die active surface 116 and the microelectronic package core first surface
106. The encapsulation material surface 124 may be utilized in further fabrication steps,
along with the microelectronic package core first surface 106, as additional surface area
for the formation of build-up layers, such as dielectric material layers and conductive
traces.
As shown in FIG. 8, the microelectronic package core 102 may include a plurality
of vias 126 extending therethrough and/or a plurality of undercuts or channels 128 in
microelectronic package core first surface 106. The embodiment shown in FIG. 8 shows
the microelectronic die thickness 115 greater than the microelectronic package core
thickness 117, such as shown in FIG. 6, but is not so limited. Such structures may be
used to allow the encapsulation material 122 to flow therein, which will result in a more
secure adherence of the encapsulation material 122 to the microelectronic package core
102.
In reference to FIGs. 7 and 8, it is noted that the encapsulation material 122 does
not cover the microelectronic die back surface 118. The uncovered microelectronic back
surface 118 allows for a heat sink to be directly attached thereto after each
microelectronic die 114 has been singulated, as will be discussed below.
Although the following description relates to a bumpless, built-up layer technique
for the formation of build-up layers, the method of fabrication is not so limited. The
build-up layers may be fabricated by a variety of techniques known in the art.
FIG. 9 illustrates a view of a single microelectronic die 114 encapsulated with
encapsulation material 122 within the microelectronic package core 102. The
microelectronic die 114, of course, includes a plurality of electrical contacts 132 located
on the microelectronic die active surface 116. The electrical contacts 132 are electrically
connected to circuitry (not shown) within the microelectronic die 114. Only four
electrical contacts 132 are shown for sake of simplicity and clarity.
As shown in FIG. 10, a first dielectric layer 136, such as epoxy resin, polyimide,
bisbenzocyclobutene, and the like, is disposed over the microelectronic die active
surface 116 (including the electrical contacts 132), the microelectronic package core first
surface 106, and the encapsulant material surface 124. The dielectric layers of the
present invention are preferably filled epoxy resins available from Ibiden U.S.A. Corp.,
Santa Clara, California, U.S.A. and from Ajinomoto U.S.A., Inc., Paramus, New Jersey,
U.S.A. The formation of the first dielectric layer 136 may be achieved by any known
process, including but not limited to lamination, spin coating, roll coating, and spray-on
deposition.
As shown in FIG. 11, a plurality of vias 138 are then formed through the first
dielectric layer 136. The plurality of vias 138 may be formed by any method known in
the art, including but not limited to laser drilling, photolithography, and, if the first
dielectric layer 136 is photoactive, forming the plurality of vias 138 in the same manner
that a photoresist mask is made in a photolithographic process, as known in the art.
A plurality of conductive traces 142 is formed on the first dielectric layer 136, as
shown in FIG. 12, wherein a portion of each of the plurality of conductive traces 142
extends into at least one of said plurality of vias 138 (see FIG. 11) to make electrical
contact with the contacts 108. The plurality of conductive traces 142 may be made of
any applicable conductive material, such as copper, aluminum, and alloys thereof.
The plurality of conductive traces 142 may be formed by any known technique,"
including but not limited to semi-additive plating and photolithographic techniques. An
exemplary semi-additive plating technique can involve depositing a seed layer, such as a
sputter-deposited or electroless-deposited metal on the first dielectric layer 136. A resist
layer is then patterned on the seed layer, such as a titanium/copper alloy, followed by
electrolytic plating of a layer of metal, such a copper, on the seed layer exposed by open
areas in the patterned resist layer. The patterned resist layer is stripped and portions of
the seed layer not having the layer of metal plated thereon is etched away. Other
methods of forming the plurality of conductive traces 142 will be apparent to those
skilled in the art.
As shown in FIG. 13, a second dielectric layer 144 is disposed over the plurality of
conductive traces 142 and the first dielectric layer 136. The formation of the second
dielectric layer 144 may be achieved by any known process, including but not limited to
film lamination, spin coating, roll coating, and spray-on deposition.
As shown in FIG. 14, a plurality of second vias 146 are then formed through the
second dielectric layer 144. The plurality of second vias 146 may be formed any method
known in the art, including but not limited to laser drilling and, if the second dielectric
layer 144 is photoactive, forming the plurality of second vias 146 in the same manner
that a photoresist mask is made in a photolithographic process, as known in the art.
If the plurality of conductive traces 142 is not capable of placing the plurality of
second vias 146 in an appropriate position, then other portions of the conductive traces
are formed in the plurality of second vias 146 and on the second dielectric layer 144,
another dielectric layer formed thereon, and another plurality of vias is formed in the
dielectric layer, such as described in FIGs. 12-14. The layering of dielectric layers and
the formation of conductive traces can be repeated until the vias are in an appropriate
position. Thus, portions of a single conductive trace be formed from multiple portions
thereof and can reside on different dielectric layers.
A second plurality of conductive traces 148 may be formed, wherein a portion of
each of the second plurality of conductive traces 148 extends into at least one of said
plurality of second vias 146. The second plurality of conductive traces 148 each include
a landing pad 150 (an enlarged area on the traces demarcated by a dashed line 152), as
shown in FIG. 15.
Once the second plurality of conductive traces 148 and landing pads 150 are
formed, they can be used in the formation of conductive interconnects, such as solder
bumps, solder balls, pins, and the like, for communication with external components (not
shown). For example, a solder mask material 156 can be disposed over the second
dielectric layer 144 and the second plurality of conductive traces 154 and landing pads
150. A plurality of vias 160 is then formed in the solder mask material 156 to expose at
least a portion of each of the landing pads 150, as shown in FIG. 16. A plurality of
conductive bumps 158, such as solder bumps, can be formed, such as by, but not limited
to, screen printing solder paste followed by a reflow process or by known plating
techniques, on the exposed portion of each of the landing pads 154, as shown in FIG 17.
FIG. 18 illustrates a plurality of microelectronic dice 114 encapsulated with
encapsulation material 122 within the microelectronic package core 102. At least one
build-up layer is formed on the microelectronic dice active surfaces 116, the
microelectronic package core first surface 106, and the encapsulant material surface 124
in the manner previously discussed. The layer(s) of dielectric material and conductive
traces comprising the build-up layer is simply designated together as build-up layer 162
in FIG. 18. The individual microelectronic dice 114 are then singulated along lines 164
(cut) through the build-up layer 162 and the microelectronic package core 102 to form at
least one singulated microelectronic die package 166, as shown in FIG. 19.
Having thus described in detail embodiments of the present invention, it is
understood that the invention defined by the appended claims is not to be limited by
particular details set forth in the above description, as many apparent variations thereof
are possible without departing from the spirit or scope thereof.
WE CLAIM :
1. A microelectronic package, comprising:
a microelectronic package core having a first surface and an opposing second
surface, said microelectronic package core having at least one opening defined therein
extending from said microelectronic package core first surface to said microelectronic
package core second surface;
at least one microelectronic die disposed within said at least one opening, said at
least one microelectronic die having an active surface; and
an encapsulation material adhering said microelectronic package core to said at
least one microelectronic die.
2. The microelectronic package as claimed in claim 1, wherein said encapsulation
material also having at least one surface substantially planar to said microelectronic die
active surface and said microelectronic package core first surface.
3. The microelectronic package as claimed in claim 2, also having build-up layers
disposed on at least one of said microelectronic die active surface, said at least one
encapsulation material surface, and said microelectronic package core first surface.
4. The microelectronic package as claimed in claim 3, wherein said build-up layers
comprise at least one dielectric layer abutting at least one of said microelectronic die
active surface, said at least one encapsulation material surface, and said microelectronic
package core first surface and at least one conductive trace disposed on said at least
one dielectric layer.
5. The microelectronic package as claimed in claim 4, wherein said at least one
conductive trace extends through said at least one dielectric layer to contact at least one
electrical contact on said microelectronic die active surface.
6. The microelectronic package as claimed in claim 1, wherein at thickness of said
microelectronic die is greater than a thickness of said microelectronic package core.
7. The microelectronic package as claimed in claim 6, wherein said microelectronic
package core has at least one via extending therethrough.
8. The microelectronic package as claimed in claim 1, wherein said microelectronic
package core is selected from the group consisting of bismaleimide triazine resin based
material, an FR4 material, polyimides, ceramics, and metals.
9. A method of fabricating a microelectronic package, said method comprising the
steps of:
providing a microelectronic package core having a first surface and an opposing
second surface, said microelectronic package core having at least one opening defined
therein extending from said microelectronic package core first surface to said
microelectronic package core second surface;
disposing at least one microelectronic die within said at least one opening, said at
least one microelectronic die having an active surface; and
adhering said microelectronic package core to said at least one microelectronic
die with an encapsulation material.
10. The method as claimed in claim 9, wherein adhering said microelectronic package
core to said at least one microelectronic with said encapsulation material involves
forming at least one encapsulation material surface substantially planar to said
microelectronic die active surface and said microelectronic package core first surface.
11. The method as claimed in claim 10, comprising the steps of:
forming at least one dielectric material layer on at least a portion of said
microelectronic die active surface, said at least one encapsulation material surface, and
said microelectronic package core first surface;
forming at least one via through said at least one dielectric material layer to
expose a portion of said microelectronic die active surface; and
forming at least one conductive trace on said at least one dielectric material layer
which extends into said at least one via to electrically contact said microelectronic die
active surface.
12. The method as claimed in claim 11, involving the step of forming at least one
additional dielectric material layer disposed over said at least one conductive trace and
said at least one dielectric material layer.
13. The method as claimed in claim 12, involving the step of forming at least one
additional conductive trace to extend through and reside on said at least one additional
dielectric material layer.
14. The method as claimed in claim 9, wherein said providing said microelectronic
package core comprises providing a microelectronic package core selected from the
group consisting of bismaleimide triazine resin based material, an FR4 material,
polymides, ceramics, and metals.
15. A method of fabricating a microelectronic package, said method comprising the
steps of:
providing a microelectronic package core having a first surface and an opposing
second surface, said microelectronic package core having at least one opening defined
therein extending from said microelectronic package core first surface to said
microelectronic package core second surface;
abutting a protective film against said microelectronic package core first surface,
wherein said protective film spans said at least one opening;
disposing at least one microelectronic die within said at least one opening,
wherein an active surface of said microelectronic die abuts a portion of said protective
film;
adhering said microelectronic package core to said at least one microelectronic
die with an encapsulation material, wherein a portion of said encapsulation material fills a
portion of said opening to form at least one encapsulation material surface abutting said
protective film; and
removing said protective film.
16. The method as claimed in claim 15, comprising the steps of:
forming at least one dielectric material layer on at least a portion of said
microelectronic die active surface, said at least one encapsulation material surface, and
said microelectronic package core first surface;
forming at least one via through said at least one dielectric material layer to
expose a portion of said microelectronic die active surface; and
forming at least one conductive trace on said at least one dielectric material layer
which extends into said at least one via to electrically contact said microelectronic die
active surface.
17. The method as claimed in claim 16, involving the step of forming at least one
additional dielectric material layer disposed over said at least one conductive trace and
said at least one dielectric material layer.
18. The method as claimed in claim 17, involving the step of forming at least one
additional conductive trace to extend through and reside on said at least one additional
dielectric material layer.
19. The method as claimed in claim 15, wherein said providing said microelectronic
package core comprises providing a microelectronic package core selected from the
group consisting of bismaleimide triazine resin based material, an FR4 material,
polyimides, ceramics, and metals.
20. The method as claimed in claim 15, wherein said abutting said protective film
comprises abutting said protective film having an adhesive against said microelectronic
package core first surface.
21. A method of fabricating a microelectronic package, said method comprising the
steps of:
providing a microelectronic package core having a first surface and an opposing
second surface, said microelectronic package core having a plurality of openings defined
therein extending from said microelectronic package core first surface to said
microelectronic package core second surface;
abutting a protective film against said microelectronic package core first surface,
wherein said protective film spans said at least one opening;
disposing a plurality of microelectronic dice within corresponding openings of the
microelectronic package core, wherein active surfaces of each of said microelectronic
dice abuts a portion of said protective film;
adhering said microelectronic package core to said plurality of microelectronic dice
with an encapsulation material, wherein a portion of said encapsulation material fills a
portion of said openings to form a plurality of encapsulation material surfaces abutting
said protective film;
removing said protective film; and
singulating each microelectronic die by cutting through said microelectronic
package core.
22. The method as claimed in claim 21, involving the step of:
forming build-up layers on at least a portion of said microelectronic dice active
surfaces, said plurality of encapsulation material surfaces, and said microelectronic
package core first surface.
23. The method as claimed in claim 21, wherein said providing said microelectronic
package core comprises providing a microelectronic package core selected from the
group consisting of bismaleimide triazine resin based material, an FR4 material,
polyimides, ceramics, and metals.
24. The method as claimed in claim 21, wherein abutting said protective film
comprises the step of abutting said protective film having an adhesive against said
microelectronic package core first surface.
A microelectronic package including a microelectronic die disposed within an
opening (104) in a microelectronic packaging core (102), wherein an encapsulation
material is disposed within portions of the opening not occupied by the microelectronic
die. Build-up layers of dielectric materials and conductive traces are then fabricated on
the microelectronic die, the encapsulant material, and the microelectronic package core
to form the microelectronic package.

Documents:

00148-kolnp-2003-abstract.pdf

00148-kolnp-2003-claims.pdf

00148-kolnp-2003-correspondence.pdf

00148-kolnp-2003-description (complete).pdf

00148-kolnp-2003-drawings.pdf

00148-kolnp-2003-form 1.pdf

00148-kolnp-2003-form 18.pdf

00148-kolnp-2003-form 3.pdf

00148-kolnp-2003-form 5.pdf

00148-kolnp-2003-gpa.pdf

00148-kolnp-2003-letter patent.pdf

00148-kolnp-2003-reply first examination report.pdf

00148-kolnp-2003-translated copy of priority document.pdf

148-KOLNP-2003-(20-04-2012)-CORRESPONDENCE.pdf

148-KOLNP-2003-(20-04-2012)-OTHERS.pdf

148-KOLNP-2003-FORM 15.pdf

148-KOLNP-2003-FORM-27-1.pdf

148-KOLNP-2003-FORM-27.pdf


Patent Number 216869
Indian Patent Application Number 148/KOLNP/2003
PG Journal Number 12/2008
Publication Date 21-Mar-2008
Grant Date 19-Mar-2008
Date of Filing 05-Feb-2003
Name of Patentee INTEL CORPORATION
Applicant Address 2200 MISSION COLLEGE BOULEVARD, SANTA CLARA, CA 95052
Inventors:
# Inventor's Name Inventor's Address
1 HENAO MARIA. 6161 VIADO LOS, CIERROS, PLEASANTON, CA 94566
2 MU XIAO-CHUN 19685 VIA ESCUELA DRIVE SARATOGA, CA 95070
3 MA QING 919 BRENTWOOD DRIVE SAN JOSE, CA 95129
4 VU QUAT 2464 EL CAMINO REAL, SANTA CLARA, CA 95051
5 LI JIAN 1008 LIVE OAK TERRACE, SUNNYVALE, CA 94086
PCT International Classification Number H01L 23/538
PCT International Application Number PCT//US01/26949
PCT International Filing date 2001-08-29
PCT Conventions:
# PCT Application Number Date of Convention Priority Country
1 09/658,819 2000-09-08 U.S.A.