Title of Invention	ARRANGEMENT FOR COATING A SUBSTRATE
Abstract	The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.

Title of Invention

ARRANGEMENT FOR COATING A SUBSTRATE

Abstract

The invention relates to an arrangement for the coating of substrates, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or above the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a spherical closure part connected with a movable rod. In a first position this spherical closure part closes a vapor conducting tube, which is connected with the evaporation source, and, in a second position, the spherical closure part abuts a spherical calotte which seals off a quartz tube.

Full Text	FORM 2 THE PATENT ACT 1970 (39 of 1970) The Patents Rules, 2003 COMPLETE SPECIFICATION (See Section 10, and rule 13] 1. TITLE OF INVENTION ARRANGEMENT FOR COATING A SUBSTRATE APPLICANT(S) a) Name b) Nationality c) Address APPLIED MATERIALS GMBH & CO., KG GERMAN Company SIEMENSSTRASSE 100, D-63755 ALZENAU GERMANY PREAMBLE TO THE DESCRIPTION The following specification particularly describes the invention and the manner in which it is to be performed : Specification The invention relates to an arrangement according to the preamble of patent claim 1. Recent developments in the production of flat screens for computers or television sets are oriented toward the so-called organic light-emitting diodes (OLEDs). The production of OLEDs can take place by means of OVPD technology (OVPD -Organic Vapor Phase Deposition, US 5 554 220), in which a carrier gas stream, at very low pressure in a heated reactor takes up organic materials and deposits these as thin layers on a substrate. In another method for coating a substrate with a thin organic layer, a substrate holder with heating means is provided, which holds on its lower surface a substrate, for example glass (EP 0 962 260 Al = US 6 101 316). Beneath this substrate are provided two evaporation sources, which vaporize organic material, which is deposited on the substrate if a shutter disposed between the substrate and the vaporizer is opened. Also known is an electrically actuated valve for glass apparatus, which can be opened and dosed by means of an electric motor (DE 20115 333 U1). The valve body is herein implemented as a cylinder. Further is known an all-metal valve with a slidable and a resting sealing partner, of which the one sealing partner is implemented in the form of a plate (DE 3015 487 Al). This valve comprises an additional sealing partner, which becomes operational if the plate-shaped sealing partner is defective. In another known valve the valve body is implemented as a ball, this ball being capable of closing a cylindrical tube (Japan 2000120551 A). A ball-shaped body also comprises a valve, which can be utilized in the environment of aggressive materials (US 3 887 162). A valve is furthermore known, which comprises a ball-shaped closure body (US 4 195 666). This valve is utilized for controlling highly corrosive fluids. It has the capacity of blocking fluids in two different positions. A servo-controlled valve for mixing two fluids in a specific ratio is disclosed in US 3 561 484. This valve also comprises a ball-shaped closure body. An evaporation apparatus with a source for vaporized organic material comprising an on-off valve is known from US 6 101 316. An evacuation device is herein connected with a container containing organic material, the evacuation device evacuating the container when the valve is closed. Arrangements for the evaporation of OLED materials are also disclosed in EP 1 357 200 Al and EP 1401 036 A2. Lastly, an arrangement for coating an areal substrate is known, which comprises a stationary evaporation source for the vaporization of materials, with which the substrate is to be coated (DE 102 24 908 Al). This arrangement comprises a driving means which moves the rareal substrate relative to the evaporation source. It comprises, in addition, a first distributor arrangement, which linearly distributes the vapor emitted by the evaporation source, as well as a second distributor arrangement, which is disposed at its one end at least in the proximity of the evaporation source and which terminates with its other end in the first distributor arrangement. This known arrangement is layed out for continuous evaporation, which means, a coating process once started is to be carried out over several hours or days. Due to good insulation and a large thermal mass, the control behavior of the evaporation source is very slow. From the time the heating means of the evaporation source is switched on, it takes more than one hour before a desired rate is reached, and the switching-off of the evaporation source - from the time the heating means is switched off until the evaporation rate is zero - takes a correspondingly long time. During this time the very expensive material is vaporized from the evaporation source without being utilized for coatings. If between the substrate and the evaporation source a shutter is provided, the material becomes deposited on this shutter. A short-term interruption of the evaporation of a few minutes is not possible. The invention therefore addresses the problem of interrupting the material flow from the evaporation source to the substrate and simultaneously saving evaporation material. The problem is resolved according to the characteristics of patent claim 1. The invention consequently relates to an arrangement for coating a substrate, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or greater than the vaporization temperature of the material to be vaporized. The vapor barrier is implemented as a quartz valve, which includes a ball-shaped closure part connected with a movable rod. In a first position this ball-shaped closure part closes a vapor conducting tube connected with the evaporation source, and, in a second position, the ball-shaped closure part abuts a spherical calotte which seals off a quartz tube. The advantage obtained with the invention resides in particular therein that the evaporation is interrupted and therewith no deposition of the material onto structural parts occurs, which are not the substrate. Thus, on the one hand, with the valve closed the substrate is no longer coated and, on the other hand, evaporation material is no longer consumed. Through the particular implementation of the vapor barrier as a special valve it is ensured that in the open position of the valve, on the one hand, the tube cross section is made available for the vapor flow and, on the other hand, the rearward space of the valve is sealed off against the penetration of the vapor into the valve guide so that it does not become stuck. The special implementation of the valve is defined in the independent claim 9 (= pseudo-independent claim). An embodiment example of the invention is shown in the drawing and will be described in the following in further detail. In the drawing depict: Fig. 1 a section through the essential structural parts of a coating installation, Fig. 2 a variant of the installation according to Fig. 1 with a closed valve, Fig. 3 the installation according to Fig. 2 with the valve open. Fig. 1 shows the essential structural parts of a coating installation 1 known per se. Herein denotes 2 a support plate, onto which is flanged a tubular housing 3 in which an evaporation source 4 is located. This evaporation source 4 is encompassed by a ceramic tube 5, which, in turn, is encompassed by a metallic protecting tube 6. The evaporation source 4 includes a crucible 7 provided with a partitioning wall 8, which separates an empty space 9 from a material space 10. In the material space 10 is located the organic substance which is to be vaporized. Beneath the crucible 7 is a stay 11 with staying springs 12, 13 and a heat sensor 14. Above the evaporation source 4 is located a quartz tube 15, which is connected at an angle of approximately 45° with a further quartz tube 16. In front of the quartz tube 16 is located the substrate 17 to be coated. Further details of the structure of the coating installation 1 can be found in DE 102 24 908 Al. Fig. 2 shows the two quartz tubes 15 and 16 again, the quartz tube 15 now extending perpendicularly to the quartz tube 16. Quartz tube 15 not only terminates with its one end in the quartz tube 16, but rather is connected in the proximity of its other end with a further quartz tube 18, in which is located the evaporation source 4. In the illustration of Fig. 2 the upper end of the quartz tube 18 is dosed off by means of a glass sphere 19. This glass sphere 19 is connected with a glass rod 20, 21 guided by a ram 22 at whose lower end is disposed a spherical calotte 23. In the open state the spherical calotte 23 seals upwardly the space formed by a ram guide 24. Quartz tube 18, sphere 19, glass rod 20 and spherical calotte 23 are brought by means of a heating means (not shown) to a temperature which is slightly above the temperature at which the material in the evaporation source 4 vaporizes. In the closed state of the valve 25 the sphere 19 presses onto the opening of the quartz tube 18 thereby closing it. Since the vapor can neither become condensed on the inner wall of quartz tube 18 nor on the lower surface of the sphere 19, vapor pressure builds up in the quartz tube 18, which prevents the further vaporization of the material located in the evaporation source 4. With the opening of the valve the sphere 19 is raised upwardly by means of the glass rod 20, 21 whereupon it closes the spherical calotte 23. Contamination of the glass rod 20, 21, of the spherical calotte 23 and of the ram 22 with the vaporized material from the evaporation source 4 is thereby prevented. The arrangement depicted in Fig. 2 of the quartz tubes 15, 16, 18 is not absolute. The valve 25 in the arrangement according to Fig. 1 could also be disposed on the quartz tube 15 depicted here. Fig. 3 shows a portion of the arrangement depicted in Fig. 2 in perspective view. Quartz tubes 15 and 16 are herein not shown in section, while tubes 18 and 24 are again shown in section. On the quartz tubes 15, 16, 18 several nipples are evident, of which only nipples 30 to 35 are provided with reference numbers. These nipples serve the purpose of maintaining heating coils 36 to 39, of which only some are depicted, on their position. With the aid of the heating coils the quartz tubes 15, 16, 18, 24 are brought to a temperature which corresponds to the vaporization temperature of the material to be vaporized. The sphere 19, which, in the representation of Fig. 3, rests in the spherical calotte 23, is heated in its position according to Fig. 2 through the heated tube 18 and, in its position according to Fig. 3, brought to the specified temperature via tube 24, ram 22, and spherical calotte 23. The valve depicted in Fig. 2 and 3 should be heatable to at least 500 °C so that vaporized material cannot condense on its walls. It is to be comprised of quartz glass, which, on the one hand, can withstand the high temperatures and, on the other hand, is chemically inert, such that the OLED materials do not decompose, which would occur in contact with, for example, high-grade steel. We Claim: 1. Arrangement for coating a substrate, comprising 1.1 an evaporation source (4) for the evaporation of materials with which the substrate (17) is to be coated, 1.2 a vapor conducting arrangement (15,16,18) from the evaporation source (4) to the substrate (17), 1.3 a mechanical vapor barrier (19 to 23) in the vapor conducting arrangement (15,16), characterized in that the vapor barrier (19 to 23) is maintained at or above the vaporization temperature of the material to be vaporized. 2. Arrangement as claimed in claim 1, characterized in that the temperature of the vapor barrier (19 to 23) is 5% to 50% above the vaporization temperature of the material to be vaporized. 3. Arrangement as claimed in claim 1 or claim 2, characterized in that the vapor conduction arrangement (15,16,18) is maintained at the same temperature as the vapor barrier (19 to 23). 4. Arrangement as claimed in claim 1, characterized in that the vapor barrier (19 to 23) is comprised of quartz. 5. Arrangement as claimed in claim 1, characterized in that the vapor conducting arrangement (15,16,18) is comprised of quartz. 6. Arrangement as claimed in one or several of the preceding claims, characterized in that the vapor barrier (19 to 23) is a valve. 7. Arrangement as claimed in claim 1, characterized in that the vapor conducting arrangement (15,16,18) includes at least one quartz tube (18). 8. Arrangement as claimed in claim 1, characterized in that the vapor conducting arrangement (15, 16, 18) includes two quartz tubes (15,18), the vapor barrier (19, 20, 23) being provided between the one quartz tube (18) and the other quartz tube (15). 9. Valve, in particular for opening and closing two vapor conducting arrangements (15,18) coupled with one another, characterized by a) a body (19) with an at least hemispherical surface, b) a rod (20, 21) connected with the body (19), c) a spherical calotte (23) for receiving at least a portion of the body (19), d) a guide (22,24) within which the rod (20, 21) can be moved. 10. Valve as claimed in claim 9, characterized in that the body (19) is a sphere. 11. Valve as claimed in claim 9, characterized in that two tubular vapo conducting arrangements (15,18) connected with one another an perpendicular on one another and the longitudinal axis of the rod (20,21 coincides with the longitudinal axis at least of the one vapor conductinj arrangement (18). 12. Arrangement as claimed in claim 1, characterized in that the vapo conducting arrangement (15, 16, 18) is provided with nipples (30 to 35) fo the mounting of heating coils (36,37,38,39). 13. Arrangement as claimed in claim 12, characterized in that the nipples (30 t( 35) are comprised of quartz glass. 14. Arrangement as claimed in claim 1, characterized in that the materials to be vaporized are organic materials for the production of light-emitting diodes. Dated this 31st day of October, 2005. HIRAL CHANDRAKANT JOSHI AGENT FOR APPLIED MATERIALS CMBH & CO., KG.

Full Text

FORM 2
THE PATENT ACT 1970 (39 of 1970)
The Patents Rules, 2003 COMPLETE SPECIFICATION (See Section 10, and rule 13]
1. TITLE OF INVENTION
ARRANGEMENT FOR COATING A SUBSTRATE

APPLICANT(S)
a) Name
b) Nationality
c) Address

APPLIED MATERIALS GMBH & CO., KG
GERMAN Company
SIEMENSSTRASSE 100,
D-63755 ALZENAU
GERMANY

PREAMBLE TO THE DESCRIPTION
The following specification particularly describes the invention and the manner in which it is to be performed :

Specification
The invention relates to an arrangement according to the preamble of patent claim 1.
Recent developments in the production of flat screens for computers or television sets are oriented toward the so-called organic light-emitting diodes (OLEDs). The production of OLEDs can take place by means of OVPD technology (OVPD -Organic Vapor Phase Deposition, US 5 554 220), in which a carrier gas stream, at very low pressure in a heated reactor takes up organic materials and deposits these as thin layers on a substrate.
In another method for coating a substrate with a thin organic layer, a substrate holder with heating means is provided, which holds on its lower surface a substrate, for example glass (EP 0 962 260 Al = US 6 101 316). Beneath this substrate are provided two evaporation sources, which vaporize organic material, which is deposited on the substrate if a shutter disposed between the substrate and the vaporizer is opened.
Also known is an electrically actuated valve for glass apparatus, which can be opened and dosed by means of an electric motor (DE 20115 333 U1). The valve body is herein implemented as a cylinder.
Further is known an all-metal valve with a slidable and a resting sealing partner, of which the one sealing partner is implemented in the form of a plate (DE 3015 487 Al). This valve comprises an additional sealing partner, which becomes operational if the plate-shaped sealing partner is defective.

In another known valve the valve body is implemented as a ball, this ball being capable of closing a cylindrical tube (Japan 2000120551 A).
A ball-shaped body also comprises a valve, which can be utilized in the environment of aggressive materials (US 3 887 162).
A valve is furthermore known, which comprises a ball-shaped closure body (US 4 195 666). This valve is utilized for controlling highly corrosive fluids. It has the capacity of blocking fluids in two different positions.
A servo-controlled valve for mixing two fluids in a specific ratio is disclosed in US 3 561 484. This valve also comprises a ball-shaped closure body.
An evaporation apparatus with a source for vaporized organic material comprising an on-off valve is known from US 6 101 316. An evacuation device is herein connected with a container containing organic material, the evacuation device evacuating the container when the valve is closed.
Arrangements for the evaporation of OLED materials are also disclosed in EP 1 357 200 Al and EP 1401 036 A2.
Lastly, an arrangement for coating an areal substrate is known, which comprises a stationary evaporation source for the vaporization of materials, with which the substrate is to be coated (DE 102 24 908 Al). This arrangement comprises a driving means which moves the rareal substrate relative to the evaporation source. It comprises, in addition, a first distributor arrangement, which linearly distributes the vapor emitted by the evaporation source, as well as a second distributor arrangement,

which is disposed at its one end at least in the proximity of the evaporation source and which terminates with its other end in the first distributor arrangement. This known arrangement is layed out for continuous evaporation, which means, a coating process once started is to be carried out over several hours or days. Due to good insulation and a large thermal mass, the control behavior of the evaporation source is very slow. From the time the heating means of the evaporation source is switched on, it takes more than one hour before a desired rate is reached, and the switching-off of the evaporation source - from the time the heating means is switched off until the evaporation rate is zero - takes a correspondingly long time.
During this time the very expensive material is vaporized from the evaporation source without being utilized for coatings. If between the substrate and the evaporation source a shutter is provided, the material becomes deposited on this shutter. A short-term interruption of the evaporation of a few minutes is not possible.
The invention therefore addresses the problem of interrupting the material flow from the evaporation source to the substrate and simultaneously saving evaporation material.
The problem is resolved according to the characteristics of patent claim 1.
The invention consequently relates to an arrangement for coating a substrate, which comprises an evaporation source and a vapor barrier between the evaporation source and the substrate. The vapor barrier is maintained at a temperature which is at least equal to or greater than the vaporization temperature of the material to be vaporized.

The vapor barrier is implemented as a quartz valve, which includes a ball-shaped closure part connected with a movable rod. In a first position this ball-shaped closure part closes a vapor conducting tube connected with the evaporation source, and, in a second position, the ball-shaped closure part abuts a spherical calotte which seals off a quartz tube.
The advantage obtained with the invention resides in particular therein that the evaporation is interrupted and therewith no deposition of the material onto structural parts occurs, which are not the substrate. Thus, on the one hand, with the valve closed the substrate is no longer coated and, on the other hand, evaporation material is no longer consumed. Through the particular implementation of the vapor barrier as a special valve it is ensured that in the open position of the valve, on the one hand, the tube cross section is made available for the vapor flow and, on the other hand, the rearward space of the valve is sealed off against the penetration of the vapor into the valve guide so that it does not become stuck.
The special implementation of the valve is defined in the independent claim 9 (= pseudo-independent claim).
An embodiment example of the invention is shown in the drawing and will be
described in the following in further detail. In the drawing depict:
Fig. 1 a section through the essential structural parts of a coating installation,
Fig. 2 a variant of the installation according to Fig. 1 with a closed valve,
Fig. 3 the installation according to Fig. 2 with the valve open.
Fig. 1 shows the essential structural parts of a coating installation 1 known per se. Herein denotes 2 a support plate, onto which is flanged a tubular housing 3 in which

an evaporation source 4 is located. This evaporation source 4 is encompassed by a ceramic tube 5, which, in turn, is encompassed by a metallic protecting tube 6. The evaporation source 4 includes a crucible 7 provided with a partitioning wall 8, which separates an empty space 9 from a material space 10. In the material space 10 is located the organic substance which is to be vaporized. Beneath the crucible 7 is a stay 11 with staying springs 12, 13 and a heat sensor 14. Above the evaporation source 4 is located a quartz tube 15, which is connected at an angle of approximately 45° with a further quartz tube 16. In front of the quartz tube 16 is located the substrate 17 to be coated. Further details of the structure of the coating installation 1 can be found in DE 102 24 908 Al.
Fig. 2 shows the two quartz tubes 15 and 16 again, the quartz tube 15 now extending perpendicularly to the quartz tube 16. Quartz tube 15 not only terminates with its one end in the quartz tube 16, but rather is connected in the proximity of its other end with a further quartz tube 18, in which is located the evaporation source 4. In the illustration of Fig. 2 the upper end of the quartz tube 18 is dosed off by means of a glass sphere 19. This glass sphere 19 is connected with a glass rod 20, 21 guided by a ram 22 at whose lower end is disposed a spherical calotte 23.
In the open state the spherical calotte 23 seals upwardly the space formed by a ram guide 24. Quartz tube 18, sphere 19, glass rod 20 and spherical calotte 23 are brought by means of a heating means (not shown) to a temperature which is slightly above the temperature at which the material in the evaporation source 4 vaporizes.
In the closed state of the valve 25 the sphere 19 presses onto the opening of the quartz tube 18 thereby closing it. Since the vapor can neither become condensed on the inner wall of quartz tube 18 nor on the lower surface of the sphere 19, vapor

pressure builds up in the quartz tube 18, which prevents the further vaporization of the material located in the evaporation source 4.
With the opening of the valve the sphere 19 is raised upwardly by means of the glass rod 20, 21 whereupon it closes the spherical calotte 23.
Contamination of the glass rod 20, 21, of the spherical calotte 23 and of the ram 22 with the vaporized material from the evaporation source 4 is thereby prevented.
The arrangement depicted in Fig. 2 of the quartz tubes 15, 16, 18 is not absolute. The valve 25 in the arrangement according to Fig. 1 could also be disposed on the quartz tube 15 depicted here.
Fig. 3 shows a portion of the arrangement depicted in Fig. 2 in perspective view. Quartz tubes 15 and 16 are herein not shown in section, while tubes 18 and 24 are again shown in section.
On the quartz tubes 15, 16, 18 several nipples are evident, of which only nipples 30 to 35 are provided with reference numbers. These nipples serve the purpose of maintaining heating coils 36 to 39, of which only some are depicted, on their position.
With the aid of the heating coils the quartz tubes 15, 16, 18, 24 are brought to a temperature which corresponds to the vaporization temperature of the material to be vaporized. The sphere 19, which, in the representation of Fig. 3, rests in the spherical calotte 23, is heated in its position according to Fig. 2 through the heated

tube 18 and, in its position according to Fig. 3, brought to the specified temperature via tube 24, ram 22, and spherical calotte 23.
The valve depicted in Fig. 2 and 3 should be heatable to at least 500 °C so that vaporized material cannot condense on its walls. It is to be comprised of quartz glass, which, on the one hand, can withstand the high temperatures and, on the other hand, is chemically inert, such that the OLED materials do not decompose, which would occur in contact with, for example, high-grade steel.

We Claim:
1. Arrangement for coating a substrate, comprising
1.1 an evaporation source (4) for the evaporation of materials with which the substrate (17) is to be coated,
1.2 a vapor conducting arrangement (15,16,18) from the evaporation source (4) to the substrate (17),
1.3 a mechanical vapor barrier (19 to 23) in the vapor conducting arrangement (15,16),
characterized in that the vapor barrier (19 to 23) is maintained at or above the vaporization temperature of the material to be vaporized.
2. Arrangement as claimed in claim 1, characterized in that the temperature of the vapor barrier (19 to 23) is 5% to 50% above the vaporization temperature of the material to be vaporized.
3. Arrangement as claimed in claim 1 or claim 2, characterized in that the vapor conduction arrangement (15,16,18) is maintained at the same temperature as the vapor barrier (19 to 23).
4. Arrangement as claimed in claim 1, characterized in that the vapor barrier (19 to 23) is comprised of quartz.
5. Arrangement as claimed in claim 1, characterized in that the vapor conducting arrangement (15,16,18) is comprised of quartz.
6. Arrangement as claimed in one or several of the preceding claims, characterized in that the vapor barrier (19 to 23) is a valve.

7. Arrangement as claimed in claim 1, characterized in that the vapor conducting arrangement (15,16,18) includes at least one quartz tube (18).
8. Arrangement as claimed in claim 1, characterized in that the vapor conducting arrangement (15, 16, 18) includes two quartz tubes (15,18), the vapor barrier (19, 20, 23) being provided between the one quartz tube (18) and the other quartz tube (15).
9. Valve, in particular for opening and closing two vapor conducting arrangements (15,18) coupled with one another, characterized by

a) a body (19) with an at least hemispherical surface,
b) a rod (20, 21) connected with the body (19),
c) a spherical calotte (23) for receiving at least a portion of the body (19),
d) a guide (22,24) within which the rod (20, 21) can be moved.

10. Valve as claimed in claim 9, characterized in that the body (19) is a sphere.
11. Valve as claimed in claim 9, characterized in that two tubular vapo conducting arrangements (15,18) connected with one another an perpendicular on one another and the longitudinal axis of the rod (20,21 coincides with the longitudinal axis at least of the one vapor conductinj arrangement (18).
12. Arrangement as claimed in claim 1, characterized in that the vapo conducting arrangement (15, 16, 18) is provided with nipples (30 to 35) fo the mounting of heating coils (36,37,38,39).
13. Arrangement as claimed in claim 12, characterized in that the nipples (30 t( 35) are comprised of quartz glass.

14. Arrangement as claimed in claim 1, characterized in that the materials to be vaporized are organic materials for the production of light-emitting diodes.
Dated this 31st day of October, 2005.
HIRAL CHANDRAKANT JOSHI
AGENT FOR APPLIED MATERIALS CMBH & CO., KG.

ARRANGEMENT FOR COATING A SUBSTRATE

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