Title of Invention

METHOD OF FABRICATING A SOLAR MODULE WITH STRUCTURED AND INTEGRATED SERIES-CONNECTED THIN-FILM SOLAR CELLS AS A SUBSTRATE CELL TYPE, A SUPERSTRATE CELL TYPE AND A SOLAR MODULE THEREOF.

Abstract Known methods of producing large-surface integrated thin-film solar modules with an amorphous, poly- or microcrystalline absorber layer always comprise division and conversion structuring processes which can cause instabilities in the structuring and which are relatively expensive. According to the inventive method which can be used to fabricate substrate solar cells (116) and superstrate solar cells, the mask (100) which is used provides for structuring itself during the deposition of layers for the tear electrode (106) and the absorber layer (11) through its geometrical form. The use of a mask (110) which can be reused as an independent element after use in this method allows for a relatively free range of possible geometric forms. This also makes possible applications inside and outside of buildings, including in the area of a window, from an esthetic and informal point of view. These types of application are also supported by the possibility of a structural connection between the solar modules produced according to the inventive method and light-collecting concentrator modules, in order considerably to increase their average and total energy conversion efficiency.
Full Text Title "METHOD OF FABRICATING A SOLAR MODULE WITH STRUCTURED
AND INTEGRATED SERIES CONNECTED THIN FILM SOLAR CELLS
AS A SUBSTRATE CELL TYPE,A SUPERSTRATE CELL TYPE AND A
SOLAR MODULE THEREOF"
Specification
The invention relates to a method of fabricating a solar module with
structured and integrated series-connected thin-film solar cells and to solar
modules made by the method. The support layer of such solar cells may be
either a substrate or a superstrate.
Thin-film solar cells of either type are provided with light-absorbing
absorber layers of cost-efficient amorphous, poly- or micro-crystalline
semiconductor materials which may be precipitated or built up on large-
surface substrates or superstrates by a many different methods. The small
layer thickness of the absorber layers and the possibility of providing a
structure during fabrication further reduce the manufacturing costs, so that
thin-film solar cells constitute a cost-efficient alternative to the cost-intensive
silicon solar cells mostly used at present and which as mono-crystalline
single or multiple layer systems following their manufacture must first be
sawed apart into individual cells and then, in the manner of high-value
semiconductor products, be further processed by complex steps. By
photovoltaic conversion of solar energy into electric power, thin-film solar
cells generate voltage levels of less than 1 Volt. In order to attain technically
useful power at a voltage of typically 12 Volts or 24 Volts, a sufficient number
of individual cells are connected in series. In the case of thin-film solar cells,
the series connection may be integrated into the layer-forming process. This
involves subdividing layers formed as whole surfaces into small strips by
suitable structuring methods, for instance paste-scribing methods and lift-off
techniques as well as mechanical and, more particularly, layer processing
methods. The purpose of the structuring is to create an electrical connection
between the electrodes at the front and rear surfaces of adjacent strip-
shaped solar cells.
From U.S. Patent 4,675,467 there is known a method of series-
connecting an integrated thin-film solar module in which both electrodes are
incorporated in prefabricated strip-form into an unstructured absorber layer.
The conductive connections between the corresponding electrodes of
adjacent solar cells are then formed in a structuring step by laser irradiation
from the transparent substrate surface into an area covered by the electrode
strips. Appropriate areas of the absorber layer are thus converted into low-
ohmic areas by a precisely defined quantity of energy, which does, however,
entail the risk of damaging the semiconductor material. Because of the lack
of spatial structuring of the absorber layer there is no electrical insulation
between the semiconductor material of adjacent solar cells which leads to
power-reducing short circuit currents. The laser treatment requires a highly
precise power level, positioning and focusing of the applied laser beam in
order to yield the desired spatially precise conversion effect. This may lead
to layer separations and damages in the immediate vicinity of the structuring
operation. Furthermore, it is necessary always to use a transparent substrate
of precisely defined homogeneous layer thickness so that the laser beam
may penetrate from the substrate side and that a power-level dependent
depth of penetration into the layers to be separated or transformed may be
precisely set.
A similar process involving prefabricated electrode strips has been
described in U.S. Patent 4,999,308, in which the laser treatment for area
conversion is used at the same time to separate the absorber layer to form
insulation trenches by blowing away semiconductor material which is thus
lost. In this combined process, the energy dosaging poses a problem which
to some extent leads to an uncertainty especially in respect of the conversion
areas, notwithstanding the fact that processing is carried out from the upper
side of the solar cells rather than through the substrate. The use of two
scribing processes for the consecutive separation of absorber layer and front
electrode at different laterally displaced positions is known from(U.S. Patent
5 296.674) The separation is accomplished by indirect laser irradiation
through the protective layer substrate so that the direct connection between
adjacent solar cells is maintained by the absorber layer. This method
requires multiple positioning of a transparent substrate while accepting short
circuit currents.
A method of series connecting an integrated thin-film solar cell module
is known from WO 9503628 in which all functional layers are separately
structured during special process steps. In accordance with the method, a
metal layer previously precipitated as a single layer on a transparent
substrate is separated by any desired structuring method into closely
adjacent strips to form a strip-shaped rear electrode. Following the
subsequent whole-surface coating with a thin semiconductor layer for forming
an absorber layer and with a front layer to form a front electrode, two
additional separate structuring steps are carried out by laser irradiation from
the side of the substrate. The first laser irradiation serves to structure or
pattern the strips of the absorber layer and of the front electrode; the second
laser irradiation serves to convert into a low-ohmic area that portion of the
absorber layer which is positioned in the covered area between opposite
electrode strips of adjacent solar cells, thus forming an integrated conductive
series-connection between the solar cells. Therefore, in the known method
the structuring involves a treble separation treatment. The first treatment
serves to separate the front electrode and the absorber layer. Laser-assisted
removal of the sensitive semiconductor layer always involves the risk of
damage to, or alteration of, the layer. The second treatment for area
conversion again requires a precisely energized laser and includes the
problems described supra.
The described methods are footed on the common task of optimization
in the sense of maximized power output or minimized surface area of the
fabricated solar modules of striped structured thin-film solar cells of either
type of support layers. Compared to monocrystalline solar cells such solar
cells are of low energy efficiency which at lower light conditions is rapidly
further reduced relative to normal conditions (light concentration AM 1.5).
Accordingly, at common deviations of seasonal and day-by-day light
intensities, depending upon the weather and at indoor applications (down to
10% of the maximum available radiation), thin-film solar cells are subject to
significant power losses. This explains the insignificant use of thin-film solar
cells in areas where solar radiation varies significantly and in indoor areas in
general. In connection with monocrystalline solar cells, light collecting
concentrator modules consisting of optical elements to maintain at, or raise
to, an optimum efficiency range the light intensity in respect of
monocrystalline solar cells have become known from many publications.
However, the goal of such known measures is not to maximize power but,
rather, to bring about as significant a reduction as possible of the very
expensive required surface of the solar module.
For instance, (U.S. Patent 5,118,361) discloses a solar module of
monocrystalline tandem solar cells made of GeAs/GaSb which is built into a
housing the cover of which is formed by a concentrator module made up of
individual Fresnel lenses of polymeric material and positioned, together with
light-collecting funnels, in front of individual solar cells. These are disposed
within the module on a flexible connection ribbon of conductive and non-
conductive strips. From (European Patent 0,657,048) there is known an
automated microchip-like connection in a very similar arrangement of
monocrystalline GaAs solar cells aiming at surface minimization.
Concentrator arrangements provided with linear focus Senses in, or as part of,
a module cover which are particularly suitable for strip-like solar modules are
known, for instance, from (U.S. Patent 4,711,972) for monocrystalline silicon
solar cells and from (U.S. Patent 5,505,7897pY monocrystalline integrated
solar cell chips made of GaAs. German Patent specification 197 44 840 A1
discloses a solar module having a forward concentrator module made of
plastic Fresnel lenses which as a structured unit tilts or slides in accordance
with the position of the sun to provide for an improved power balance.
Finally, European Patent 0,328,053 describes strip-like solar modules with a
forward Fresnel lens which are mounted in the corner of a window pane of a
double window and which are to provide the electricity for operating blinds in
the between the windows.
However, neither the mentioned nor any other publication discloses an
application for concentrator modules for amorphous, poly- or micro-crystalline
thin-film solar modules in particular in any kind of arrangement, so that such
modules have hitherto shown a relatively poor power balance which is
strongly dependent on the time of day and on the weather. More particularly,
little or no consideration has been given to optical structuring methods in
connection with applications of known solar modules, including thin-film solar
cells precipitated as large surfaces on glass substrates, which has led to
relatively uniform solar module structures used primarily in the field of
industry. Esthetically patterned solar modules may be found, for instance, in
roof pans (see German Patents 42 279 29 and 43 176 74 or wrist watches
which also may take different colors into consideration (see European Patent
0,895,141).
With reference to the above explanations and proceeding from the
state of the art relating to the method of fabricating a solar module with
structured and integrated series-connected thin-film solar cells which is most
closely related to the inventive method, it is a first object of the present
invention to provide an improved fabrication method of very low complexity as
regards structuring. In this connection, those aspects of the improvement
addressed to the fabrication of substrate and superstrate cells alike are to
relate especially to a simplified method and, at the same time, to a fabrication
process which can be more easily controlled and reproduced. Moreover, it is
an object of the invention to achieve an exceptionally low use of material and
an assured separation of the individual layers at a complete insulation of the
individual solar cells. Based on these consideration, the cost efficiency of the
fabrication method is to be improved. In addition, the basic task of optimizing
a solar module is to be accomplished by suitable forms and measures,
especially in connection with concentrator modules of solar modules
fabricated in accordance with the inventive method, thus leading to a special
flexibility in terms of their applicability.
In the accomplishment of these objects, the invention provides for thin-
film solar cells of the substrate type of claim 1 and for thin-film solar cells of
the superstrate type of auxiliary claim 2. In this connection, the methods of
the two claims substantially correspond to each other, except that the method
of claim 2 is quasi an inverse of the method of claim 1. This may be
explained by the fact that but for their inversed layer sequence substrate and
superstrate solar cells are of the same basic construction. In this connection,
the substrate functions as a bottom support layer, and light impinges on the
solar cell from above, whereas the superstrate functions as a top support
layer, and light impinges through the superstrate. However, in order to
provide for a comprehensible description, the advantages of the invention will
primarily be described on the basis of method of claim 1, particularly since
the advantages also result from the inverse method of claim 2. Following
this, the differences between the two methods will be briefly set forth.
The inventive method according to claim 1 makes possible continuous
structuring of all functional layers at an extremely iow complexity of pattern
formation. By using a mask, particularly one with a striped pattern, two
structuring steps otherwise required are avoided. On the one hand, this
relates to the usual structuring of the rear electrode after application on the
substrate or, in the inverse method, after application of the absorber layer. In
accordance with the invention, the rear electrode is structured directly with a
superposed mask during coating with a corresponding metal layer. This
leads to no loss of material since the mask may be used again. On the other
hand, the method step of the otherwise conventional and particularly critical
subsequent structuring of the semiconductor absorber layer is avoided as
well. This is of particular advantage as problems arising during mechanical
or, more particularly, laser-assisted cutting of the absorber layer are avoided.
Damage to individual layers, imprecise borders between layers and non-
reproducible layer conditions resulting from laser irradiations cannot occur.
In accordance with the method of claim 1, the absorber layer like the
rear electrode is structured by use of the mask. This leads to the integrated
series connection of the individual solar cells by a simple but especially
effective method step. Before application of the absorber layer on the
substrate and mask, the mask is moved slightly in a lateral direction leading
to the formation of narrow upper and lower ribs which after removal of the
mask which are contacted by the front layer subsequently applied as an
uninterrupted surface, the front layer being the front electrode. In the area of
the lower ribs the rear electrode sections at one side are completely enclosed
by the application of the absorber layer. Interruption of the absorber layer
between the individual solar cells is achieved by the mask which is covered
as well so that no short circuit currents can occur. A void in the absorber
layer above the rear electrode sections on its other side is achieved in the
area of the upper ribs and serves for subsequent contacting by the front
electrode. Covering the mask at the same time again leads to no loss of
material, at the same time the mask too is completely processed up to the
absorber layer. After removal of the mask and application of the transparent
conductive front layer as an uninterrupted surface the method in accordance
with the invention requires only a single subsequent structuring step by
mechanical or laser assisted processes. At an interface which includes the
upper ribs and a portion of any abutting solar cell, the front layer is simply
separated down to the rear electrode at such a separation width as to form a
correspondingly structured front electrode without short circuits between
individual solar cells. Difficult conversion processes in the absorber layer for
forming conductive ribs are avoided. The location of the interfaces is not
particularly critical as they need be positioned laterally displaced only in the
area of the upper ribs or in the direction of the abutting solar cell. As regards
the position of the interfaces it is important to prevent short circuits between
the rear and front electrodes. When cutting in the area of the active solar cell
this is can be ensured.
The method of claim 1 of fabricating substrate solar cells in principle
corresponds to the method of claim 2 of fabricating superstate solar cells
with the exception that the method steps have to be carried out in reverse
sequence. However, since the in the case of superstrate cells the
transparent conductive front layer for the front electrode on the superstrate is
mechanically not as sturdy as the metal layer for forming the rear electrode
on the substrate of substrate cells, the mechanical separation step of
structuring the front electrode cannot be carried out in the same manner (in
this case the scribing would penetrate down to the superstrate). Therefore, in
the case of the method of claim 2 the entire transparent superstrate is first
covered with a conductive front layer. After the mask has been fixed,
structuring is carried out by scribing along the filled surface of the mask in a
manner similar to using a ruler so that the mask with one of its lateral margins
is positioned directly adjacent to the structuring trenches. Thereafter, the
absorber layer is applied and the structuring trenches are also filled with
absorber material. Lateral sliding the mask again results in the formation of
corresponding upper and lower ribs. Following application of the metal layer
for structuring the rear electrode which may also be structured as p-TLO, the
mask which by now is also covered by a complete solar cell structure is finally
removed. Therefore, the main difference from the method sequence of claim
1 resides in the advanced structuring step and the later removal of the mask.
An important aspect of the inventive fabrication method resides in the
designing of the mask. Whereas hitherto series-connected solar cells have
been structured continuously in stripes without alterations, the invention
makes it possible to introduce different designs. Almost any geometric
structure, for instance zig-zag or undulating patterns as well as signatures or
company logos, may be practiced by adherence to two simple marginal
conditions. These are, on the one hand, the basic character of the structure
which must be composed of individual smaller partial surfaces. Such
"digitizing" of analog structures does not, however, limit the optical function,
as from a certain distance it is no longer visually distinguishable if it is not a
deliberately applied element of the geometric pattern. When segregating the
structure into small partial surfaces their size, as the second condition, must
be calculated such that any blank surfaces and, if applicable, any filled
surfaces in the geometric pattern must be of approximately the same size. In
this manner, any current irregularities are avoided which would occur in case
of partial surfaces of different sizes. Uniformity of the filled surfaces is always
required whenever -as set forth infra- the mask, too, is to be further
processed into a complete solar cell. However, the size of the filled surfaces
may be different from that of the blank surfaces. The second marginal
condition does not pose any significant problem in its realization as it may
simply be incorporated into the arrangement of the solar module.
The possibility of providing a relatively unrestricted design for the
mask required for the fabrication method makes it possible to integrate a
completely novel aspect into the application of solar modules fabricated in
accordance with the invention. Because of their function, the solar modules
are usually arranged in the visual range at any rate. It is now possible to
utilize solar modules fabricated in accordance with the invention as esthetic
design elements for walls of buildings and as advertising media, thus
significantly increasing their usefulness. Normally, the geometric pattern
would consist of rectangular and straight-line narrow stripes. In order to keep
them together within the mask, the mask may at its margins be provided with
connecting ribs. During the application of individual layers for fabricating the
solar module, the connecting ribs may be arranged outside of any given
support layer. If for reasons of geometry this is not possible or where the
geometric pattern requires connecting ribs in its interior, particularly to
achieve sufficient mechanical sturdiness, such ribs would during the process
sequence initially form jumpers. Depending upon the complexity of the
geometric pattern it is thus useful, in accordance with an improvement of the
inventive method, to provide for an additional method step following method
steps (1.8) or (2.8): (A) Structuring short circuit areas in the front layer
generated by connecting ribs in more complex geometric patterns.
The individual layers may be provided by generally known methods,
such as, for example, vapor deposition or sputtering. The composition of the
required layer package for a solar module in thin-film technology fabricated in
accordance with the invention arising is a function of the materials used and
of the applications. More particularly, prior to applying the rear or front
electrode in method step (1.2) or (2.1) the following additional method step
may optimally be provided in a further advance of the invention: (B)
Application of a barrier layer for forming a diffusion barrier. This may be a Cr
layer which prevents an interdiffusion, for instance, of Na. Furthermore,
following application of the metal layer (1.3) or following structuring of the
front layer (2.4) the following additional method step may be optimally
provided: (C) Application of an adhesion and/or source layer for forming an
adhesive agent. For instance, this may be a Na-source layer (NaF) and/or an
adhesion-assist layer of, for instance, ZnSe or ZnS. Finally, another method
step may be optimally introduced between the absorber forming coating and
the application of the front layer, i.e. prior to method step (1.6) or (2.5): (D)
Applying at least one buffer layer for forming a space-charge zone. This
layer may consist, for instance, of CdS or of ZnS.
Depending upon the future application of the finished solar module, an
application of transparent materials for forming the substrate or superstrate
layers and/or the metal layer may be provided for as a further advance of the
method in accordance with the invention. This would yield a special
applicability for windows and semi-transparent areas and would take
advantage of the fact that large-surface glass panes make are usually used
at any rate as substrates or superstates for thin-film solar cells. The material
for forming the transparent metal layer may, for instance, be ZnO, SnO or ITO
(indium tin oxide), which in addition to other layers of different doping may
also be used for forming the transparent conductive front layer (TLO). By
contrast, non-transparent metall layers may consist, for instance, of
molybdenum, wolfram (tungsten) or of another metal. Finally, for forming the
absorber layer, which also is non-transparent, a further advance of the
method in accordance with the invention may provide, depending upon the
support layer, for the use of amorphous, poly- or monocrystalline silicon,
polycrystalline CdTe or chalcopyrite compounds of the general formula
AgxCu1-xInyGa1-ySzSe2-z-wTew as the semiconductor material, wherein x and y
may assume values between 0 and 1, and z and w may assume values
between 0 and 2 such that the sum of w + z does not substantially exceed 2.
The mask may consist of different materials which provide for the requisite
mechanical sturdiness. For forming substrate cells the mask may be made
as a metal mask. In principle, the mask need not be transparent as it will be
covered by the non-transparent absorber layer. A transparent but not
necessarily metallic mask may be.used for fabricating superstrate cells if a
separate use of the mask is intended as a positive. However, before
releasably fixing such a mask, which may consist, for instance, of glass or
transparent plastic resistant to the method, on the superstrate, it must first be
prov at its upper surface with a transparent front electrode (TLO). Such
coating may, for instance, be carried out in a manner similar to the coating for
forming the rear electrode of substrate cells.
The essential improvement and simplification of the method are
accomplished by the method in accordance with the invention by the use of
the mask which may be structured in accordance with predetermined wishes
and marginal conditions. This allows elimination of a number of structuring
processes as separate method steps. In particular, the lateral shifting of the
mask eliminates two otherwise necessary scribing steps. The measure of
lateral shift is a spacer for covering from below the section of the electrode at
the one side to provide access for the next coating, and for covering from
above at the other side to provide a void from the next coating. The size of
the covers from, below and from above relates to the overall dimensions of
the structured solar cells and is to ensure an assured cover on the one hand
and an assured separation on the other side. In accordance with a further
advance of the method is it thus advantageous laterally to shift the mask by
about .1 mm. Technically it is simple to execute and ensure such shifting,
and it does not require any in the setup of the method between individual
method steps.
In the method according to the invention the mask assumes a
significant role at different aspects. Its direct coprocessing leads to no losses
in material. It is useful repeatedly to reuse masks, particularly those of
complex geometric structures and, therefore, higher costs, without
intermediate reprocessing. Layers of insignificant material deposits applied
during prior method cycles do not interfere. When, in the end, a mask is not
used anymore, the applied material may be recycled which is of particular
importance in large scale productions. In addition to these and those
advantages described supra the mask has the further inherent advantage
that it may be used as a positive for its own configuration, separate from the
large-surface solar module which is configured quasi as a negative of the
form of the mask. For that reason, in accordance with a further advance of
the method in accordance with the invention it is of overall advantage
repeatedly to use the mask or further to process a removed mask the filled
surfaces of which must then be configured to have uniform surfaces. This
does not result in another method sequence; processing on the substrate or
superstrate and the mask continue identically. Since the mask may also be
used no material is lost at any step in the method and the relatively expensive
material are optimally used. Furthermore, the usability supports esthetic
considerations in which the geometric structures, in particular company logos,
may also be used as a positive. With structures of lesser complexity, the
mask may yield individual solar cells of simple geometry which by simple
series connections may be combined to solar modules (see infra). However,
in accordance with a further advance of the invention, care must be taken
when defining the geometry that it provides for an esthetically and/or
informally oriented geometric pattern of individual solar cells adhering to
partial patterns of identical surface size in its blank surface and/or in its filled
surfaces. In this manner, the solar cells on the negative as well as the solar
cells on the positive each contribute an identical current thus avoiding the
occurrence of current irregularities. It is not necessary that the surfaces of
the filled surfaces and of the blank surfaces be identical. In accordance with
a further aspect of the invention, additional design aspects may be realized
by partial patters of different colors whereby the selected colors must be such
that they can be integrated into the photovoltaic process.
In addition to esthetic considerations in solar modules fabricated in
accordance with the invention, the optimizing aspects regarding power
maximizing or surface minimizing referred to supra have to be taken into
consideration. In an embodiment of the solar module fabricated in
accordance with the invention, it is particularly advantageous in support layer
types to provide a light-collecting concentrator module consisting of individual
concentrators as image-forming or non-image-forming optical elements the
arrangement of which matches the arrangement of the individual solar cells.
The use of concentrators makes possible a significant increase of the
average and total energy conversion efficiency of a solar module. The optical
elements may, for instance, be lenses of conventional semi-convex or
Fresnel-like configuration. In accordance with a further embodiment the solar
module may at its light-impinging surface be encapsulated by a transparent
glass or plastic material with or without transparent cover pane and the
concentrators are integrated in the glass or plastic or are applied to or ground
into the interior surface of the cover pane. In particular, the application may
be an adhesive one. Structuring of the exterior surface is disadvantageous,
however, as it complicates cleaning and the effect of weather and dirt may
adversely affect the collecting action of the concentrators. Preferably, the
concentrators used may have a geometric concentration factor of Cg which
lies within a numerical range between 1 and 10. Such concentrator modules
are in principle well known and have been described in detail supra in
connection with the state of the art. But in connection with solar modules
made in accordance with the inventive method several interesting
combinations are possible. For instance, in accordance with a further
embodiment of the invention, the concentrator may be arranged at a distance
from the solar module of solar cells structured as laterally straight lines in the
manner of a Venetian blind, the individual slats of which are constituted by
linear concentrator lenses which may be arranged to track the position of the
sun. Such arrangements are particularly suitable for mounting in a window,
particularly those exposed to strong sunlight. Since the solar module itself
may be made to be semi-transparent it may thus contribute to shadowing an
interior room. An advantageous embodiment of the solar blind may be
characterized by the fact that each concentrator lens is suspended at each
end by two supports linked to two guide rails which extend in guide slots fixed
relative to the solar module in mounting blocks and may be adjusted simply
by pressing movable wedge blocks. Thus all lenses may be adjusted in
common. Furthermore, the concentrator lenses follow a path such that at
different light exposures their correct adjustment relative to the solar cells is
ensured.
In connection with the use of the mask as its own solar cell support
another embodiment of the invention may provide for a solar module formed
from the mask and for series connecting the electrodes of the individual solar
cells by way of an integrated metallized contact ribbon. In such an
arrangement, the contact ribbon may be structured as a transparent flexible
contact foil the width of which corresponds to the entire width of the solar
module. In addition, the solar module may be slidably mounted by lateral
winding and unwinding of the contact foil extending beyond the solar module,
in front of or behind (depending upon the type of solar cell) a further
structured and integrated series-connected solar module which is mounted
stationary. Depending upon the individual solar modules relative to each
other a selection may be made between maximum light transmissivity and
maximum current production. Such measures result in a partially transparent
solar module with variable shadowing which may be structured according to
esthetic considerations. Overall, by an optimum combination of esthetic and
functional structural elements, a solar module fabricated by the method of the
invention and modified optimally relative to its power output may arranged by
itself or in common with other solar modules in front of or within windows, wall
and roof elements of a building, or in the interior thereof. The degrees of
transparency of the solar modules used may be matched with those of the
building surfaces, and they may be changeable, for instance, fully transparent
in front of windows disposed in the shade and in front structural elements
made of glass, semi-transparent in front of windows exposed to the sun, and
non-transparent in front of building walls, in roof areas and when used as sun
screens. When used as semi-transparent solar modules, the surface to be
covered by the solar cells may be significantly reduced by an application of
concentrators. This leads to greater flexibility for architectural designs. The
small distance between the solar and concentrator modules makes possible
the manufacture of ready-to-use inserts used in the construction of buildings
without requiring a significant increase in the space used for conventional
solar modules. Completely new fields of application are being opened up
which should make the use of solar modules -even within building- much
more attractive. In order to avoid repetitions regarding the mentioned
modifications reference may be had to the following specific description for
further details.
BREIF DESCRIPTION OF THE ACCOMPANYING DRAWINGS:
The fabrication method in accordance with the invention and
embodiments ofsolarr modules fabricated thereby will be described for a
better understanding with reference to the schematic figures, in which:
Figure 1 depicts the sequence of the inventive fabrication method of a
substrate cell;
Figure 2 depicts the sequence of the inventive fabrication method of a
supertrate cell;
Figure 3 depicts a solar module fabricated by the method and consisting
of substrate cells with a concentrator module;
Figure 4a, 4bdepict a solar module in two positions, fabricated by the
method and consisting of substrate cells with a
concentrator module structured in the manner of a Venetian
blind;
Figure 5a, 5bdepict in planar view and in section a solar module
fabricated by the method and consisting of substrate cells of
variable shadowing ; and
Figure 6 depicts a diagram showing the effect of the concentrator
modules.
In Figure 1 the method in accordance with the invention is depicted on
the basis of selected states of fabrication of an embodiment of a solar module
to be fabricated shown in cross section. A thin-film mask 100 corresponding
to the desired geometry and adhering to the predetermined marginal
conditions is fabricated in a first method step 1.1. The embodiment shown is
one of comb-like geometry having filled surfaces 101 and blank surfaces 102
of identical size. Connecting ribs 103 in the geometric pattern lie outside of
the solar cell structure to be fabricated and are not given further
consideration. In a method step 1.2 the mask 100 is releasably fixed on a
transparent substrate layer 104 of glass. In a next method step 1.3 a metal
layer 105 is applied to the substrate layer 104 and the fixed mask 100. This
leads to the formation on the substrate layer 104 of a rear electrode 106
structured in stripes shaped like the blank spaces 102 in the geometric
pattern of the mask 100. In method step 1.3 a metal layer 105 is also
deposited on the filled surfaces 105. In the following method step 1.4 the
mask 100 is laterally shifted, for instance by about .1 mm, across the striped
rear electrode 106 in the direction of the arrow. At this point it is to be
mentioned that for the sake of a clear presentation the dimensions have been
shown in distorted fashion. The lateral shifting leads to the formation of
narrow lower cover ribs 107 and narrow upper cover ribs 108.
A photovoltaically active thin semiconductor layer 109, for instance of
the chalco-pyrite compound CulnS2 is deposited in a next method step 1.5 on
the substrate 104 and the laterally shifted mask 100. This leads to the
formation of a structured absorber layer 110 over the mask 100 which also
covers the lower cover rib 107; but it does not cover the upper cover rib 108.
In this manner the striped rear electrode 106 in the area of the lower cover rib
107 becomes encased by the semiconductor layer 109 while remaining
exposed in the area of the upper cover rib 108. The mask 100 is released
and removed in method step 1.6. Thereafter, it may be processed further
separately but in parallel into a "positive solar module" and differs from the
"negative solar module" only by the absence of the substrate layer 104 which
is, however, mechanically replaced by the mask 100. A transparent
conductive front layer 111 which forms the front electrode 112 is applied in
the following method step 1.7 on the substrate 104 in the area now vacated
by the removal of the mask 100 and in the area of the upper cover rib 108 on
the rear electrode 100 as well as, but separate therefrom, on the removed
mask 100. In this manner, the separated mask 100 is fully processed and
initially forms an unconnected solar module 113 of individual thin-film solar
cells 114 in the form of the filled surfaces 101 of the geometric pattern without
the connecting ribs thereof. The solar module 113 may then be finishes
(analogously in Figures 3 and 5) by subsequent suitable connection
processes which may be carried out with relative ease and in integrated
manner because of the lacking substrate layer 104 and the downwardly
exposed metal layer 105. In the inserted state light impinges on the substrate
104 in the direction of the arrow.
On the "negative" solar module 115 the front electrode 112 is initially
unstructured and electrically short circuits all solar cells 116. Therefore, in an
ensuing method step 1.8 the front layer 111 is thus opened in areas 119 of
separation of the upper cover ribs 108 down to the striped rear electrode 106
by a suitable scribing process, for instance by a laser beam by gaps 117
which eliminate the short circuits. Generally the rear electrode 106 adheres
more firmly to the substrate layer 104 than does the absorber layer 109.
Thus, the solar cells 116 are electrically series connected in an integrated
manner with the individual absorber layer strips 118 remaining electrically
insulated. The solar module is thus finished and ready for use.
The inventive method of fabricating superstate cells is analogously
shown in Figure 2. In a first method step 2.1 a thin mask 150 is again
provided in accordance with a predetermined geometric pattern. If
subsequent reuse of the mask is planned as a proper solar module, it is made
of a transparent material and on its upper surface it is provided with a
separately applied front electrode which has not been shown in the figure. In
an ensuing method step 2.2 a transparent conductive front layer 152 for
forming a front electrode 153 is applied on a substrate 151. In the
embodiment selected the front electrode 153 consists of a plurality of SnO
layers of different doping (ITO or ZnO are possible). Thereafter, the mask
150 is releasably fixed on the front layer 152 (method step 2.3). Thereafter,
in method step 2.4 the scribing of the front layer 152 is performed along the
outer margins of the mask 150 functioning as mechanical or optical rulers, in
order to structure the front electrode 153. In a next method step 2.5 a
semiconductor layer 154 is applied for forming an absorber layer 155
structured in correspondence with the geometry of the mask. In the manner
of the method described supra, the mask 150 is then, in method step 2.6
laterally shifted by a small distance of about .1 mm. Thus, upper cover ribs
156 and lower cover ribs 157 are formed. In the ensuing method step 2.7
these are covered, exactly like the scribed structuring trenches 158, by a
metal layer 159 for structuring a rear electrode 160. In a last method step 2.8
the mask 150 is removed. The solar module is finished with a corresponding
structuring and integrated series connection between individual thin-film solar
cells 162. In an inserted state light impinges through the superstrate 151 in
the direction of the arrow.
Following the description of the two analogous methods of fabricating
substrate and superstrate cells, solar modules fabricated by the method are
to be described hereinafter in greater detail in connection with the use of
concentrator modules. This will always be based on the substrate cell type.
It is, however, expressly to be mention at this point that all embodiments may
also be executed on the basis of superstrate cells after appropriate
conventional technical adjustment.
Figure 3 (the meaning of reference numerals not explained here and in
the following figures may be taken from figure 1 or any preceding figure)
depicts a solar module 200 fabricated by the inventive method, in a partially
transparent embodiment with laterally structured solar cells 2001 on a
transparent substrate 202 and a light-collecting concentrator module 203 as
integrated light concentration. Such a solar module 200 may be used, for
instance, as a window or as an element of demanding architectural fagades.
!n the selected embodiment, an enclosure which required by every standard
thin-film solar module in order to be protected from weather conditions, is
realized by a housing 204 which also serves to divert the generated current,
and by a glass plate 205 behind which is provided a transparent plastic 206
(e.g. epoxy or artificial resin) for filling the intermediate space. The
concentrator module 203 is arranged at the interior surface 207 of the glass
plate 205 and is provided with individual concentrators 208 which in their
arrangement are matched to the arrangement of the individual solar cells
201. In the selected embodiment they are strip-like semi-convex lenses
adhesively attached to the interior side of the glass plate 205. Reference
should be had to figure 6 for an explanation of the effect of the concentrators.
Figure 4 depicts an embodiment of a partially transparent solar module
300 with solar cells 301 structured as straight lines on a transparent substrate
302 and provided with a concentrator module 303 structured as a solar
Venetian blind including tracking linearly focusing concentrator lenses 304.
The solar cells 301 are arranged behind the separately suspended blind-like
concentrator module 303. This consists of as many lamellate linearly
focusing concentrator lenses 304 as there are strip-like solar cells 301 within
the solar module 300. Each concentrator lens 304 is attached at its two ends
by way of two shanked suspension points 305 to two guide bars 306 which in
turn extend through guide slots 307 in mounting blocks 308. The position of
the mounting blocks 308 is stationary with respect to the solar module 300 so
that an individual adjustment of the concentrator lenses 304 is avoided. The
guide bars 306 are adjusted in the guide slots 307 by simple pressure of
movable wedge blocks 309. In this manner the concentrator lenses 304
follow a path which ensure an appropriate adjustment relative to the solar
cells 301 at different incidents of light. The incident of light has been
indicated by dash-dotted lines for two different angles of incident in the upper
(a) and in the lower portion (b) of figure 4. It is to be noted, firstly, that this
kind of light concentration is particularly suitable for superstate cells in which
the integration of the concentration into the solar module encounters
difficulties and, secondly, that both the angle of inclination of the concentrator
lenses 304 and the position of their center of gravity are tracked correctly.
The positioning signal for the tracking may be obtained in a simple manner
from the current output of the solar cells 301. In the present embodiment the
shape of the lateral pattern of the solar cells 301 has to be a straight-line one
so that proper irradiation by the concentrator lenses 304 may be ensured. It
is possible, however, depending upon the desired geometric concentration
ratio to select a mark space ratio between solar cell and free space different
from 2:1.
Figure 5 depicts a partially transparent laterally structured combination
solar module 400 with variable shadowing, in a planar view at (a) and cross-
section at (b). The combination solar module 400 consists of a stationary
solar module 401 constructed of rigid solar cells 402 on a transparent
substrate 403 and, arranged above the stationary solar module 401, of
movable solar module 404 realized on a striped mask 405. Solar cells 406
prepared on the mask 405 are electrically series-connected to each other by
a flexible transparent contact foil 407 between the front and back sides of the
striped solar cells 406. The surface of the contact foil 407 is metallized by a
transparent conductive oxide. Thus, the contact foil 407 may be spread over
the entire width of a window, thus resulting, on the one hand, in a low series
resistance loss and, on the other hand, in increased mechanical sturdiness of
the flexible solar module 404. Each end of the connecting contact foil 407 is
wrapped over a cylindrical body 408 which also serves as outward electrical
feed. The cylindrical body 408 is suspended in a frame element 409 and may
be rotated from the exterior so that the flexible solar module 404 may be
moved laterally. In this manner, the stationary solar module 401 on the glass
substrate 403 may be selectively shaded, rendering the window semi-
transparent at low current generation. Otherwise, the spatially variable solar
cells 406 are positioned between the rigid solar cells 402 of the stationary
solar module 401 which renders the windows totally opaque and current
generation is maximized. In a variation of this embodiment it would not be
necessary to structure the solar cells 402, 406 as straight-line stripes; rather,
they may also be structured according to esthetic aspects as long as their
surfaces satisfy the general marginal conditions and, for such application, are
congruent as well. At this point it must also be mentioned that if superstrate
cells were used the movable solar cells would have to be placed beneath the
stationary solar cells.
Since the distance between the concentrators and the solar cells in the
selected embodiments is relatively small, the concentrators will provide for
low light concentration only, which in thin-film solar cells nevertheless results
in a significant improvement of the average efficiency. Figure 6 depicts a
typical measuring curve of the efficiency of a chalco-pyrite solar cell as a
function of light concentration from which three characteristic facts may be
derived:
1. The average spectral irradiation energy at noon on a summer day
is internationally approached by the AM 1.5 global spectrum according to IEC
norm 904-3 (1989) .to be mentioned at this point. An our latitude, light
conditions are prevailing in which the light intensity may vary by as much as
factor 10 between summer and winter on the one hand and as a result of
variable cloudiness on the other hand. Hence, in its operation the solar cell
is subjected to an irradiation energy of about 10% - 100% of the energy which
in accordance with AM 1.5 is to be expected globally.
2. The energy efficiency relating to the irradiation intensity is varying
such that an operation at low irradiation levels is not favorable. Thus, in the
solar cell shown in figure 5 an efficiency of ? = 9.2% at an irradiation of AM
1.5 global (C = 1); however, at 10% of that irradiation (C = .1) the energy
efficiency is only ? = 6.5%. The optimum efficiency of this solar cell, ? =
9.5%, is reached only at a concentration of C = 2 - 3.
3. By using light concentrators of low geometric concentration factors
Cg the irradiation level to be expected during operation is shifted into a range
favorable to thin-film solar cells. Figure 6 depicts three possible
concentration factors Cg = 1, 3, 6, and it becomes apparent that at a light
incidence of 10% -100% of the standard sun AM 1.5 global, the average
efficiency of this typical solar cell remains in excess of ? = 8.8%, i.e. above
90% of the efficiency of 9.7% which may be achieved with this cell, at a six-
fold light concentration of Cg = 6. A shift of the maximum to higher
concentrations may be expected at an increased optimization of the
properties of the solar cell (lowering of the series resistance).
Overall, the use of concentrators of a geometric concentration factor
Cg in a numeric range between 1 and 10 is favorable. In most cases, a
geometric concentration Cg = 6 is entirely sufficient to ensure an optimum
efficiency. This low value renders the use of cost-efficient plastic Fresnel
lenses in combination with chalco-pyrite cells particularly interesting. In such
an arrangement, a solar cell typically measuring from between .5 - 5.0 cm2
rather than being placed precisely into the focal point of the Fresnel lens, is
placed about .5 cm ahead of it thus rendering the illumination of solar cell
homogeneous. Further measures to increase the concentration such as, for
instance, expensive secondary concentrators of the kind necessary for Si or
GaAs cells are not necessary for amorphous and poly or microcrystalline
solar cells.
List of Reference Characters
100 Mask
101 Filled surface
102 Blank surface
103 Connecting rib
104 Substrate layer
105 Metal layer
106 Rear electrode
107 Lower cover rib
108 Upper cover rib
109 Semiconductor layer
110 Absorber layer
111 Front layer
112 Front electrode
113 Non-connected solar module
114 Non-connected thin-film solar cell
115 Solar module
116 Solar cell
117 Separation gap
118 Absorber layer strip
119 Interface
150 Mask
151 Superstrate
152 Front layer
153 Front electrode
154 Semiconductor layer
155 Absorber layer
156 Upper cover rib
157 Lower cover rib
158 Structuring trench
159 Metal layer
160 Rear electrode
161 Solar module
162 Thin-film solar cell
200 Solar module
201 Laterally structured solar cell
202 Transparent substrate
203 Concentrator module
204 Housing
205 Glass plate
206 Transparent plastic
207 Interior side
208 Concentrator
300 Solar module
301 Solar cell
302 Transparent substrate
303 Concentrator module
304 Concentrator lens
305 Suspension point
306 Guide bar
307 Guide slot
308 Mounting block
309 Wedge block
310 Light beam
400 Combination solar module
401 Stationary solar module
402 Rigid solar cell
403 Transparent substrate
404 Spatially variable solar module
405 Mask
406 Flexible solar cell
407 Contact foil
408 Cylindrical body
409 Frame elemen
WE CLAIM:
1. Method of fabricating a solar module (115) with structured and integrated
series-connected thin-film solar cells (116) as a substrate cell type, characterized
by the method steps:
(1.1) providing a thin-film mask (100) according to a predetermined
geometric pattern of filled surfaces (101) with integrated blank
surfaces (102) of uniform size (102),
(1.2) releasably fixing the mask (100) on a substrate (104) as support layer;
(1.3) applying a metal layer (105) for structuring a rear electrode (106) in
the shape of the blank surfaces (102) in the geometric pattern of the
mask (100);
(1.4) laterally shifting the mask (100) across the structured rear electrode
(106) for forming narrow upper cover ribs (108) in the direction of the
shift and lower cover ribs (107) in a direction opposite the shift;
(1.5) applying a photovoitaically active thin semiconductor layer (109) of'
amorphous or poly or micrqcrystalline semiconductor material for
forming a structured absorber layer (110);
(1.6) releasing and removing the mask (100);
(1.7) applying a transparent conductive front layer (11) of at least one layer
for forming a front electrode (112); and
(1.8) structuring the front layer (111) in separation areas (119) of the upper
cover ribs (108) with short circuit eliminating separation gaps (117)
down to the metal layer (105) of the rear electrode (106).
2. Method of fabricating a solar module (161) with structured and
integrated series-connected thin-film solar cells (162) as a superstate type,
characterized by the method steps:
(2.1) providing a thin-film mask (150) according to a predetermined
geometric pattern of filled surfaces with integrated blank surfaces of
uniform size;
(2.2) applying a transparent conductive front layer (152) of at least one layer
on a superstate (151) as a support layer for forming a front electrode
(153);
(2.3) releasably fixing the mask (150) on the transparent superstrate layer
(151);
(2.4) structuring the front layer (152) along the filled surfaces in the
geometric pattern of the mask (150) down to the superstate layer
(151);
(2.5) applying a photovoltaically active thin semiconductor layer (154) of
amorphous or poly or microcrystalline semiconductor material for
forming a structured absorber layer (155);
(2.6) laterally shifting the mask (150) over the structured absorber layer
(155) for forming narrow upper cover ribs (156) in the direction of the
shift and lower cover ribs (157) in a direction opposite the shift;
(2.7) applying a metal layer (159) for structuring a rear electrode (160) in
the shape of the blank surfaces in the geometric pattern of the mask
(150); and
(2.8) releasing and removing the mask (150).
3. Method as claimed in claims 1 or 2, having the additional
method step following method step (1.8) or (2.8) depending on the complexity
of the geometric pattern, of:
(A) structuring short circuit areas in the front layer (111; 152) generated by
connecting ribs (103) in complex geometric patterns.
4 Method as claimed in one of claims1 to 3, having the
additional method step following method step (1.2) or (2.1) of
(B) applying a barrier layer for forming a diffusion barrier.
5. Method as claimed in one of claims 1 to 4, having the
additional method step following method step (1.3) or (2.4) of
(C) applying an adhesion and/or source layer for forming an adhesive
agent.
6. Method as claimed in one of claims 1 to 5, having the additional
method step preceding the method step (1.6) or (2.5) of
(D) applying at least one buffer layer for forming a spatial charge zone.
7. Method as claimed in one of claims 1 to 6, comprising using
transparent materials for forming the substrate or superstrate layer and/op
metal layer (104; 151 / 105; 159).
8 Method as claimed in one of claims 1 to 7, having a support
layer dependent use of amorphous or poly or microcrystalline silicon,
polycrystalline CdTe or chalco-pyrite compounds of general formula AgxCu1
xlnySzSe2-2-wTew as semiconductor material for forming the absorber layer
(110) wherein x and y may assume values between 0 and 1 and z and w
values between 0 and 2 such that the sum of w + z does not substantially
exceed the value of 2.
9. Method as claimed in one of claims 1 to 8, comprising a use of transparent
materials for forming the mask (150).
10. Method as claimed in one of claims 1 to 9, having a lateral shift of the
mask (100; 150) in the range of .1 mm.
11. Method as claimed in one of claims 1 to 10, having a repeated use or a
separate processing of the released mask (100; 150) the filled
surfaces of which are then to be formed of equal size.
12. Solar module with structured and integrated series-connected solar
cells fabricate by the method as claimed in one of claims 1 to 11, having the
presence of a geometric structuring oriented on esthetic and/or informative
viewpoiptswhile adhering to equally sized partial patterns in blank surfaces
(102) and/or filled surfaces (101).
13. Solar module as claimed in claim 12, wherein the
partial patterns are of different colorations with the selected colors being
integratable into the photovoltaic process.
14. Solar module as claimed in claim 12 or 13, having the
provision of a light-collecting concentrator module (203; 303) of individual
concentrators (203; 304) structured as image-forming or non-image-forming
optical elements the arrangement of which is matched to the arrangement of
the individual photo cells (201; 301).
15. Solar module, as claimed in claim 14, wherein it is
encapsulated at its light incidence side by a transparent glass or plastic
material (206) with or without a transparent cover pane (205) and that the
concentrators (208) are integrated into the glass or plastic material (206) or
are applied to the internal side (207) of the cover pane (205) or are ground
thereinto.
16 Solar module as claimed in claim 14 or 15, wherein
the concentrators (208; 304) have a geometric concentration factor Cg in
a numeric range between 1 and 10.
17. Solar module as claimed in one of claims 12 to 16, wherein
the concentrator module (303) is arranged at a distance in front of
the solar module (300) of straight-line structured solar cells (301) and is
structured as a Venetian blind the individual slats of which are formed by
linear concentrator lenses (304) which may be moved in correspondence with
the position of the sun.
18. Solar module as claimed in claim 17, wherein
each concentrator lens (304) is mounted by two shanked suspension points
(305) on two guide bars (306) which extend in guide slots (307) in mounting
blocks (308) which are stationary relative to the solar module (300) and which
may be repositioned pressing movable wedged blocks (309).
19 Solar module as claimed in oneof claims 12 to 18, wherein
the solar module (404) is structured from the mask (110) and that the
electrodes (106, 112) of the individual solar cells (406) are series connected
by an integrated metalized contact ribbon.
20. Solar module as claimed in claim 19, wherein the
contact ribbon is structured as a transparent flexible contact foil (407) the
width of which corresponds to the total width of the solar module (400).
21. Solar module as claimed in claim 20, wherein the
solar module (404), depending upon the type of solar cell, is mounted in front
of or behind another structured and integrated series-connected solar
module (401) which is stationarily arranged and which by a lateral winder and
unwinder (408) of the contact foil (407) extending beyond the solar module
(404) is mounted for lateral shifting, the lateral winder and unwinder (408)
being also structured as electrical polarization for the solar cell current.
22, So|ar module as claimed in one of claims 12 to 21, wherein it
is arranged individually or in common with other solar modules
(200; 300; 400) in front of or in window, facade or roof elements of a building
or in an interior area thereof.
Known methods of producing large-surface integrated thin-film solar modules
with an amorphous, poly- or microcrystalline absorber layer always comprise
division and conversion structuring processes which can cause instabilities in
the structuring and which are relatively expensive. According to the inventive
method which can be used to fabricate substrate solar cells (116) and
superstrate solar cells, the mask (100) which is used provides for structuring
itself during the deposition of layers for the tear electrode (106) and the
absorber layer (11) through its geometrical form. The use of a mask (110)
which can be reused as an independent element after use in this method
allows for a relatively free range of possible geometric forms. This also
makes possible applications inside and outside of buildings, including in the
area of a window, from an esthetic and informal point of view. These types of
application are also supported by the possibility of a structural connection
between the solar modules produced according to the inventive method and
light-collecting concentrator modules, in order considerably to increase their
average and total energy conversion efficiency.

Documents:

IN-PCT-2002-1283-KOL-CORRESPONDENCE 1.1.pdf

IN-PCT-2002-1283-KOL-CORRESPONDENCE.pdf

IN-PCT-2002-1283-KOL-FORM 27.pdf

in-pct-2002-1283-kol-granted-abstract.pdf

in-pct-2002-1283-kol-granted-assignment.pdf

in-pct-2002-1283-kol-granted-claims.pdf

in-pct-2002-1283-kol-granted-correspondence.pdf

in-pct-2002-1283-kol-granted-description (complete).pdf

in-pct-2002-1283-kol-granted-drawings.pdf

in-pct-2002-1283-kol-granted-examination report.pdf

in-pct-2002-1283-kol-granted-form 1.pdf

in-pct-2002-1283-kol-granted-form 18.pdf

in-pct-2002-1283-kol-granted-form 3.pdf

in-pct-2002-1283-kol-granted-form 5.pdf

in-pct-2002-1283-kol-granted-gpa.pdf

in-pct-2002-1283-kol-granted-priority document.pdf

in-pct-2002-1283-kol-granted-reply to examination report.pdf

in-pct-2002-1283-kol-granted-specification.pdf

IN-PCT-2002-1283-KOL-OTHERS 1.1.pdf


Patent Number 224798
Indian Patent Application Number IN/PCT/2002/1283/KOL
PG Journal Number 43/2008
Publication Date 24-Oct-2008
Grant Date 22-Oct-2008
Date of Filing 16-Oct-2002
Name of Patentee HAHN-MEITNER-INSTITUT BERLIN GMBH
Applicant Address GLIENICKER STR.100, 14109, BERLIN
Inventors:
# Inventor's Name Inventor's Address
1 JAGER- WALDAU ARNULF FRITSCHESTR. 75, 10585, BERLIN
2 LUX-STEINER MARTHA CHRISTINA GLIENICKER STR. 60,14109 BERLIN
3 HARNEIT WOLFGANG FABRICIUSSTR. 3, 10585, BERLIN
PCT International Classification Number H01L 27/142
PCT International Application Number PCT/DE01/01295
PCT International Filing date 2001-03-29
PCT Conventions:
# PCT Application Number Date of Convention Priority Country
1 100 17 610.0 2000-03-30 Germany