Title of Invention	ULTRA LOW K (ULK) SICOH FILM AND METHOD OF FORMING THE SAME
Abstract	The present invention provides a multiphase, ultra low k film which exhibits improved elastic modulus and hardness as well as various methods for forming the same. The multiphase, ultra low k dielectric film includes atoms of Si, C, 0 and H, has.a dielectric constant of about 2.4 or less, nanosized pores or voids, an elastic modulus of about 5 or greater and a hardness of about 0.7 or greater. A preferred multiphase, ultra low k dielectric film includes atoms of Si, C, 0 and H, has a dielectric constant of about 2.2 or less, nanosized pores or voids, an elastic modulus of about 3 or greater and a hardness of about 0.3 or greater.

Title of Invention

ULTRA LOW K (ULK) SICOH FILM AND METHOD OF FORMING THE SAME

Abstract

The present invention provides a multiphase, ultra low k film which exhibits improved elastic modulus and hardness as well as various methods for forming the same. The multiphase, ultra low k dielectric film includes atoms of Si, C, 0 and H, has.a dielectric constant of about 2.4 or less, nanosized pores or voids, an elastic modulus of about 5 or greater and a hardness of about 0.7 or greater. A preferred multiphase, ultra low k dielectric film includes atoms of Si, C, 0 and H, has a dielectric constant of about 2.2 or less, nanosized pores or voids, an elastic modulus of about 3 or greater and a hardness of about 0.3 or greater.

Full Text

Documents:

2733-CHENP-2005 ABSTRACT.pdf

2733-CHENP-2005 CLAIMS.pdf

2733-CHENP-2005 CORRESPONDENCE OTHERS.pdf

2733-CHENP-2005 CORRESPONDENCE PO.pdf

2733-CHENP-2005 DESCRIPTION (COMPLETE).pdf

2733-CHENP-2005 DRAWINGS.pdf

2733-CHENP-2005 FORM-1.pdf

2733-CHENP-2005 FORM-18.pdf

2733-CHENP-2005 FORM-3.pdf

2733-CHENP-2005 FORM-5.pdf

2733-CHENP-2005 PCT.pdf

2733-CHENP-2005 PETITIONS.pdf

2733-CHENP-2005 POWER OF ATTORNEY.pdf

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Patent Number

232684

Indian Patent Application Number

2733/CHENP/2005

PG Journal Number

13/2009

Publication Date

27-Mar-2009

Grant Date

20-Mar-2009

Date of Filing

21-Oct-2005

Name of Patentee

INTERNATIONAL BUSINESS MACHINES CORPORATION

Applicant Address

Armonk, New York 10504,

Inventors:

#	Inventor's Name	Inventor's Address
1	GATES, Stephen	Mcconnell, 22 Inningwood Road, Ossining, NY 10562,
2	GRILL, Alfred	85 Overlook Road, White Plains, NY 10605,

PCT International Classification Number

C23C 16/32

PCT International Application Number

PCT/US2004/008195

PCT International Filing date

2004-03-17

PCT Conventions:

#	PCT Application Number	Date of Convention	Priority Country
1	10/390,801	2003-03-18	U.S.A.