Title of Invention	APPARATUS AND METHOD FOR DETECTING THE FOCUS POSITION OF AN OPTICAL SYSTEM
Abstract	An apparatus and a method are presented for detecting the focal position of an optical system (10) with a radiation source (12), a focusing imaging system (16), an at least partially reflective surface (18) on the focus (18a), a digital camera (24) for recording an image reflected by said surface (18), a computer (C) for evaluating the image recorded by the camera (24), and with an optical element (34; 36) in the beam path of the optical system (10) upstream of the focusing imaging system (16), which element influences said image depending on the focal position.

Title of Invention

APPARATUS AND METHOD FOR DETECTING THE FOCUS POSITION OF AN OPTICAL SYSTEM

Abstract

An apparatus and a method are presented for detecting the focal position of an optical system (10) with a radiation source (12), a focusing imaging system (16), an at least partially reflective surface (18) on the focus (18a), a digital camera (24) for recording an image reflected by said surface (18), a computer (C) for evaluating the image recorded by the camera (24), and with an optical element (34; 36) in the beam path of the optical system (10) upstream of the focusing imaging system (16), which element influences said image depending on the focal position.

Full Text	The invention relates to an apparatus and a method for detecting the focal position of an optical system. In particular, the invention relates to an apparatus and a method for detecting the depth of focus of an imaging optical system and moreover also to an apparatus and a method for controlling the focal position and in particular the depth of focus. Furthermore, the invention also relates to an ophthalmological treatment and/or diagnosis apparatus using said apparatus and/or said method. In the case of the optical systems under discussion here, the system in question is in particular an imaging optical system in a material processing installation using light sources, such as lasers and LEDs in particular. Material processing should be understood here to mean also material structuring in the microrange, e.g. for dielectric materials, such as biological tissue, or also metallic materials. In particular, the invention can be used in ophthalmological optical systems, especially in refractive corneal surgery, such as LASIK, for example. A particularly suitable application area for the present invention in this case is fs-LASIK, thus refractive corneal surgery using a femtosecond laser. In the aforesaid optical imaging systems, achieving highly precise material processing operations depends inter alia on exact control of the focal position. "Focal position" is understood here above all to mean not only the location of the focus in the direction of the optical axis (so-called depth of focus), however, but more generally also the position and orientation of the focused radiation, thus e.g. an offset in relation to the ideal optical axis of the system or angularity of the actual axis of the optical radiation in relation to the ideal (desired) optical axis. In fs-LASIK it is particularly important to adhere to the calculated depth of focus and this is a particular application of the present invention. In DE 10 2004 009 212 Al, an optical contact element for laser material processing is presented. This contact element is used in the preferred embodiment for fs-LASIK. In this case this contact element consists of a diffractive optical structure. These structures are intended to minimize the incidence angles occurring due to high numerical apertures of the lens. The diffractive optical element (DOE) consists here of a grating structure with radi- ally adjusted grating period. The grating periods in this case are between 2001/mm and 5001/mm. Values in the μm range are indicated as spot sizes. Due to optical limits, only one numerical aperture of approx. 0.3 is possible. Enlargement of the aperture is achieved by using a second diffractive element in the beam path of the lens. This DOE is likewise executed as a circular grating structure with a grating period that becomes larger towards the optical axis. Achieving higher numerical apertures is indicated here as an advantage of this execution. Furthermore, the contact element is executed curved. The radius of curvature corresponds to the radius of curvature of the eye, approx. 8 mm. Material processing is carried out with this uniformly preset radius of curvature. The suction attachment is carried out similar to WO 03/002008 Al and EP 1 159 986 A2. Focus control is not carried out with this presented method. In EP 0 627 675 Al, a diffractive optical device is presented for the mapping of one or more space points from a beam. Here the diffractive structure likewise consists of a segment-like arrangement of arbitrary binary or multistage diffractive elements. The arrangement can be a hexagonal or hexangular arrangement in particular. Thus mapping of a light beam is achieved. However, only an intensity or/and phase transformation is undertaken. In US 2002/0171028, an apparatus for focus control is described. Here the returning light is brought by an imaging beam path to interference with a second bundle of rays and thus interferometric wave control is carried out. Focus control by means of interferometric wavefront control is carried out likewise in US 6,666,857 B2. The active wavefront control during the photoablation process on the human eye is then achieved by a combination of adaptive mirrors. No active wavefront control is to be undertaken. In US 2004/0051976 Al, an optical arrangement of a confocal microscope, consisting of a laser source emitting predominantly in the UV spectral range, a beam expander, a diffractive pinhole array and an objective lens is described. A diffractive pinhole array is not described in its exact embodiment. The increase in efficiency can be seen as one advantage of this technical embodiment, as amplitude pinhole arrays have a typical transmission of between 4% and 10% depending on the aperture ratio. With a diffractive pinhole array, on the other hand, transmission values of such an optical element of up to 80% are possible, dependence on the aperture ratio or the number of pinholes only being conditional on the manufacturing here. In US 2004/0021851, an optical arrangement consisting of a laser and subsequent beam shaping optics is used to measure the focal length of an unknown lens. Measurement of the focal length is carried out in this case by focusing on a reference surface at various distances. The portion of the radiation that is reflected back is detected. The spot diameters are then evaluated at the respective distances. The focal length is determined by means of the "Newton's" relation Z Z'=f2. An optical grating, which is not described in greater detail, is used to decouple the portion of the radiation reflected back. The Jones matrix formalism is likewise drawn on to calculate the focal length. The accuracy of the method is near 1%. In US 6,909,546 B2, an optical arrangement consisting of a light source (Nd:YAG2w) and subsequent beam shaping optics is described. In this case two diffractive optical elements are used to homogenize the laser radiation. The first of the two DOEs is used here for homogenization and spatial frequency filtering. A subsequent pinhole carries out the spatial frequency filtering. Located inside the 2f system of spatial frequency filtering is the second DOE, which produces the desired intensity distribution in the far field. The far field is produced either by the field lens or by the 2nd DOE. The desired intensity distribution is produced in the focus. Focus control is not carried out in this method. The object of the invention accordingly is to provide an apparatus and a method with which the focal position of an optical system can be determined precisely. To this end the invention provides an apparatus for detecting the focal position of an optical system with a radiation source, a focusing imaging system, an at least partially reflec- tive surface on the focus, a suitable digital sensor system (e.g. CCD camera, CMOS camera or the like) for recording an image that is reflected by said surface, a computer for evaluating the image recorded by the camera, and an optical element in the beam path of the optical system upstream of the focusing image system, which optical element influences said image depending on the focal position. In this case said focusing optical imaging system is preferably focusing optics with adjustable (variable) focal position, thus in particular a system with which the location of the focus is adjustable in a direction parallel to the optical axis of the image (thus the depth of focus). In addition, in such a system the focal position is usually also adjustable in a direction perpendicular to the optical axis of the radiation, e.g. in fs-LASIK. The apparatus according to the invention and the corresponding method thus serve in particular for the initial setting and alignment of an optical system such that immediately prior to material processing in relation to a predetermined plane, the so-called surface, the focus is adjusted precisely, in particular so that it lies exactly on this surface. When used in LASIK, said null plane is preferably a surface that arises due to the fact that the cornea is attached by suction in the area of interest to a reference surface (this is known as such to the LASIK expert). The flattening disc, which is transparent for the radiation used, is coated on its side facing the cornea and lying close to this such that a small percentage of the incident radiation is reflected. This reflection then produces said image of the radiation focused onto this null plane, which image is measured using said camera and evaluated. In ideal focusing, the focus should therefore lie exactly on this null plane (thus essentially on the flattened cornea surface in the example shown) and according to the evaluation of the reflected image the optical system is then adjusted so that the focusing is optimal, thus the position of the focus is exactly in this null plane. The optical system is thus set and aligned and can be used for the subsequent material processing. In the subsequent material processing the position of the focus is usually changed in relation to said null plane. Thus in fs-LASIK, for example, when cutting the so-called flap the focus is placed in the stroma and the focus positions are varied successively at right angles to the optical axis to produce the flap. This is known as such. The initial setting of the system as described above guarantees exact positioning of the foci at the desired target points. In other material processing operations the null plane, which can also be described as the reference plane, can be defined differently and does not necessarily have to coincide with the surface of the material to be processed. The radiation focused onto the null plane and the measurement of the image reflected in this plane supply calibration of the optical system such that the setting of the optical imaging properties of the optical system for the ideal state of focusing exactly in the null plane is known due to the image measurement, so that then, starting out from these settings of the optical system, the focal position can be changed according to the desired material processing, e.g. into the inside of the cornea. According to one configuration, said optical element, which influences the focus image to be measured depending on the focal position, is a diaphragm matrix (so-called pinhole array). The optical element can also be a so-called diffractive optical element (DOE), which produces a dot pattern in the far field distribution (known as such to the person skilled in the art and not explained in greater detail here). Said optical element can be arranged in the beam path of the reflected image between the reflective surface and the camera, or also outside this beam path. Advantages result in each case according to the type of application. The amplitude (intensity) or the phase (wavefront) of the reflected image can preferably be influenced locally with the optical element and the defocus portions of the wavefront can be rendered visible. It is also possible to provide said optical element in the beam path both phase-sensitively and amplitude-sensitively, in particular a combination thereof. According to a preferred configuration, the optical element produces a dot pattern, in particular a regular dot pattern in the form of a matrix. The invention also provides a method for detecting the focal position of an optical system, in which the radiation of a radiation source is mapped via a focusing imaging system in a focal plane and wherein to determine the focal position of the optical system including the imaging system an image is produced on the focus, which image is reflected there and is recorded by a camera, wherein an optical element influences the recorded image depending on the focusing of the radiation, and depending on said influencing of the image, information about the focal position of the focused radiation at the envisaged focal point is derived. Practical examples of the invention are described in greater detail below with reference to the drawing. Fig. 1 shows schematically a first practical example of an optical system with an apparatus for detecting a focal position; Fig. 2 shows a second practical example of an optical system with an apparatus for detecting the focal position; Fig. 3 shows schematically a practical example of an arrangement according to figure 2 with schematic representation of phase distributions of the radiation in the system and with a hole matrix; Fig. 4 shows a practical example of an arrangement according to figure 2 with a diffractive optical element; and Figs. 5, 6 show practical examples of images recorded by a camera with focusing mapping in the manner of a hole matrix with exact focusing and/or focusing errors. According to figure 1, an optical system 10 has a light source 12, which can be e.g. a laser (such as an fs-laser, for example) or an LED etc. The radiation emitted by the light source 12 passes through an output mirror 14 and is focused via a focusing imaging system 16 onto a plane 18. The focusing imaging system 16 is only indicated schematically in the figures by a single lens. Normally the focusing imaging system 16 has a plurality of lenses, of which one or more can be actuated for setting and changing the focus. Such optical imaging systems are known as such. In figure 1, areas (points) are marked by the reference signs 20a and 20b at which an optical element described in greater detail below is optionally to be positioned. Examples of such optical elements are the optical elements 34 and 36 shown in figures 3 and 4. Radiation reflected by the reflective surface 18 passes via the optical imaging system 16 and if applicable the optical element arranged in area 20a and described in further detail below to the output mirror 14 and is deflected upwards from there in figure 1 via imaging optics 22 to a digital camera 24, e.g. a so-called CCD camera with high local resolution. The digital image recorded by the camera 24 is entered into a computer C and evaluated there, as described in greater detail further below. Figure 2 shows a modified practical example, with components and features having the same or similar functions being provided with the same reference signs. In the example according to figure 2, a beam expander (telescope) consisting of the optical elements 26, 28 is provided to expand the beam prior to its focusing with the imaging system 16. Instead of the Keppler telescope shown in the figure, another beam shaping system can also be used in its place. Generally the optical system designated a "beam expander" in figure 2 can also be a beam shaping system. As already mentioned above, an optical element can be arranged in the areas 20a and/or 20b according to figures 1 and 2 that, depending on the more or less optimal focusing by means of the imaging system 16 onto the reflective surface 18, influences the image described above, which was produced by reflection and recorded by the camera 24, and so facilitates a conclusion as to whether the focusing onto the plane corresponding to the surface 18 is precisely that which is desired or whether the focal position is displaced in relation to this plane, e.g. lies too far forward or too far back in the direction of the optical axis (so-called depth of focus). According to figure 3, a shadow mask 34 is arranged as an optical element in the present sense in the beam path upstream of the focusing imaging system 16. In the ideal case, the optical imaging system 16 is thus set such that the radiation coming from the light source 12 is focused precisely in the plane 18 at a predetermined point. The focus is marked in figure 3 by the reference sign 18a. The practical example according to figure 3 corresponds to the example according to figure 2 with a beam expander in the area indicated by reference sign 32. The phase distributions are also marked symbolically there by reference signs 30a, 30b, 30c. The optical element 34 is a hole matrix with N x M individual holes in the regular arrangement shown. The optical element can be executed in this practical example as a pure amplitude-related element, thus influencing intensities of the radiation. Typical hole diameters in the shadow mask lie between 1 μm and 100 μm. The holes can be in particular hexangular, square, hexagonal or also circular. The arrangement of the individual holes is oriented to the beam profile used and the requirements in respect of accuracy with regard to the focal position. With the system described, focal positions can be determined accurate to a few μm. Since the radiation on the path to the plane 18 and the image reflected in the plane 18 each pass through the optical element 34, the image measured by the camera 24 is influenced depending on the accuracy of the focusing in the plane 18. A change in the focal position in relation to the plane 18 (which is the null plane defined above) of a few micrometres can be detected by evaluation of the image recorded by the camera 24 in the computer C. It is also possible to determine the radiation output occurring in the focus by integration of the intensities measured by the camera 24 at the individual image points. Fig. 5 shows, by way of example and schematically, reflection images obtained and evaluated in this manner. In this case figure 5 shows in the middle the matrix-like hole image obtained in the event that the optical system including the focusing imaging system 16 is set such that the focusing lies exactly on the desired point in the null plane 18. As stated, the reflective surface for producing the measured image also lies in this plane 18. As the hole image in figure 5, middle, shows, in the reflected image the individual holes are illuminated entirely homogeneously without a spherical portion, according to the input beam profile. In the left-hand hole image, figure 5 shows a displacement of the focal position backwards by approx. 100 μm in relation to the null plane 18. Compared with exact focusing (figure 5, middle), the image evaluation yields a modification of the individual image dots in the matrix and the computer C is calibrated for the evaluation such that it "recognizes" this deviation. The calibration of the computer can take place e.g. experimentally in such a way that using a known optical imaging system changes in the reflected image produced are recorded and stored specifically depending on the focal position, so that then the focal position can be determined by comparison with actually measured images. On the right, figure 5 shows defocusing by -100 μm with a lens focal length of 50 mm with corresponding modification of the hole image compared with ideal focusing. Generally speaking, the asymmetry of the image, as shown to the left and right in figure 5, permits analysis of the focusing. If, on the basis of image evaluation using the computer C, this analysis results in an asymmetrical brightness distribution in the image, then elements of the focusing imaging system 16 can be changed until the image evaluation shows that the focus lies exactly in the plane 18. Figure 4 shows a practical example of the apparatus for detecting the focal position of an optical system 10, in which the optical element is arranged in area 20b in the practical example according to figure 2, thus in such a way that the image reflected on the plane 18 does not pass through the optical element 36 on its way to the camera 24. The optical element 36 in this case is a diffractive optical element (DOE), which forms e.g. a "1 to N" beam splitter, thus splits an incident single beam into N single beams, wherein N can vary e.g. between 2 and 50. The divergence caused by the diffractive element 36 can be corrected refractively or diffractively by a second structure (not shown). Several diffractive optical elements can also be arranged one behind another, depending on the beam profile and desired analysis. An advantage of an arrangement with diffractive optical elements is the possibility of correction of the incident phase distribution. The phase distribution can be influenced by both the light source and the following optical elements, thus in particular the beam expander. In this practical example also, analogous to the description with reference to figure 3, the image reflected in the plane 18 is recorded by the camera 24 and evaluated in the computer C. Figure 6 shows three images recorded by the camera 24 in the event that the diffractive optical element produces a matrix-like radiation distribution, wherein the image on the right in figure 6 shows the case of ideal focusing with relatively uniform illumination of the individual image dots. In figure 6, left, the case is shown in which the focal position deviates laterally from the ideal imaging point 18a, to be precise by several hundred micrometres. The individual image dots are illuminated asymmetrically. Figure 6, middle, shows a focal position displaced laterally in another direction, wherein the individual matrix-like light dots are likewise illuminated less symmetrically than in the case of ideal focusing according to the image in figure 6, right. An optical element 36 in the form of a DOE has the advantage compared with a hole matrix of high transmission. With a diffractive element, efficiency of between 80 and 90% can typically be achieved. Such an arrangement also facilitates very high dynamics in the evaluation of the focal position, i.e. deviations of the focus from the ideal target position can be established over a wide range. It is also possible to arrange the diffractive optical element 36 in the areas 20a according to figures 1 and 2. The diffractive optical element can also be executed as a binary element or also as a so- called multi-level grating structure. The grating structures can be one-dimensional or also two-dimensional. If an arrangement according to figures 1, 2, 3 or 4 is used in fs-LASIK, then the reflective surface 18, which defines the null plane explained above, can be e.g. the rear of a transparent disc in a suction apparatus known as such, which is constructed (coated or uncoated) such that a small percentage of the incident radiation is reflected to obtain the image to be recorded by the camera 24. The following are used in particular as diffractive optical elements: gratings, Fresnel zone lenses, so-called beam-shaping elements etc. So-called refractive optical components can also be used as element (36): e.g. micro-lens arrays, beam-shaping elements etc. If the optical element 34 is used for amplitude analysis, then shadow masks or also arrangements of holes in any geometry such as square, hexangular, hexagonal etc. are particularly suitable, depending on the beam type and analysis aim. The optical element can also be formed as a slot or as an arrangement of several slots. Using the arrangements described, not only can the focal position be determined and controlled, but beam divergences, laser outputs, deviations of the radiation from the optical axis, deviations in the so-called beam product M2 or changes in the output beam profile of the light source 12 can also be detected, since all these beam parameters can have an influence on the reflected image recorded by the camera 24. With regard to all these beam parameters the computer C can be provided experimentally beforehand with a database through targeted trials, which database assigns deviations from the ideal target values, each of which correspond to image alterations, to individual beam parameters, so that the system is adjustable to ideal values by intervention with corresponding correcting variables. The use of diffractive optical elements here facilitates compensation of any phase alterations possibly occurring in the beam path that can also influence the focal position. The Hartmann Shack sensor, known as such, does not facilitate such an analysis. We Claim : 1. Apparatus for detecting the focal position of an optical system (10) with a radiation source (12), a focusing imaging system (16), an at least partially reflective surface (18) on the focus (18a), a digital sensor system (24) for recording an image reflected by said surface (18), a computer (C) for evaluating the image recorded by the digital sensor system (24), and with an optical element (34; 36) in the beam path of the optical system (10) upstream of the focusing imaging system (16), characterized in that the optical system (10) is a LASIK arrangement and that the optical element (34; 36) in the beam path influences the phase or amplitude of said image depending on the focal position, wherein the partially reflective surface (18) reflects a small percentage of the incident radiation to obtain the image to be recorded using the digital sensor system. 2. Apparatus according to claim 1, characterized in that the optical element (34; 36) is a hole matrix. 3. Apparatus according to claim 1, characterized in that the optical element (34; 36) is a diffractive optical element. 4. Apparatus according to one of the preceding claims, characterized in that the optical element (34) is arranged in the beam path of said reflected image. 5. Apparatus according to one of claims 1 to 3, characterized in that the optical element (36) is arranged outside the beam path of the reflected image. 6. Apparatus according to one of the preceding claims, characterized in that the optical element (34; 36) has a grating structure. 7. Apparatus according to claim 3, characterized in that the diffractive optical element (34; 36) produces a dot pattern, in particular a dot pattern in the form of a matrix. 8. Apparatus according to one of the preceding claims, characterized in that the radiation source (12) is an fs-laser. 9. Apparatus according to one of the preceding claims with means for setting the imaging of the optical system (10) depending on the evaluation of the computer. 10. Method for detecting the focal position of an optical system (10) immediately prior to material processing, in which the radiation of a radiation source (12) is mapped via a focusing imaging system (16) in a focal plane (18) and wherein to determine the focal position of an optical system including the imaging system (16) by means of an optical element (34; 36) in the beam path an image is produced on the focus (18a), which is reflected there and is recorded by a camera (24), wherein said optical element (34; 36) influences the image recorded depending on the focusing of the radiation and wherein depending on said influencing of the image a conclusion is derived about the focal position of the focused radiation in relation to an envisaged focal point (18a), characterized in that by means of the optical element (34; 36) the phase or amplitude of the image is influenced depending on the focal position and that the optical system is a LASIK arrangement, wherein the partially reflective surface (18) reflects a small percentage of the incident radiation to obtain the image to be recorded using the digital sensor system. 11. Method according to claim 10, wherein by means of said derived conclusion about the focal position an optical element of the optical system (10) is set to change the focal position. 12. Apparatus for carrying out an ophthalmological treatment or diagnosis with femtosecond laser radiation using an apparatus according to one of claims 1 to 9. An apparatus and a method are presented for detecting the focal position of an optical system (10) with a radiation source (12), a focusing imaging system (16), an at least partially reflective surface (18) on the focus (18a), a digital camera (24) for recording an image reflected by said surface (18), a computer (C) for evaluating the image recorded by the camera (24), and with an optical element (34; 36) in the beam path of the optical system (10) upstream of the focusing imaging system (16), which element influences said image depending on the focal position.

Full Text

The invention relates to an apparatus and a method for detecting the focal position of an
optical system. In particular, the invention relates to an apparatus and a method for detecting
the depth of focus of an imaging optical system and moreover also to an apparatus and
a method for controlling the focal position and in particular the depth of focus. Furthermore,
the invention also relates to an ophthalmological treatment and/or diagnosis apparatus
using said apparatus and/or said method.
In the case of the optical systems under discussion here, the system in question is in particular
an imaging optical system in a material processing installation using light sources,
such as lasers and LEDs in particular. Material processing should be understood here to
mean also material structuring in the microrange, e.g. for dielectric materials, such as
biological tissue, or also metallic materials. In particular, the invention can be used in
ophthalmological optical systems, especially in refractive corneal surgery, such as LASIK,
for example. A particularly suitable application area for the present invention in this case
is fs-LASIK, thus refractive corneal surgery using a femtosecond laser.
In the aforesaid optical imaging systems, achieving highly precise material processing
operations depends inter alia on exact control of the focal position. "Focal position" is
understood here above all to mean not only the location of the focus in the direction of the
optical axis (so-called depth of focus), however, but more generally also the position and
orientation of the focused radiation, thus e.g. an offset in relation to the ideal optical axis
of the system or angularity of the actual axis of the optical radiation in relation to the ideal
(desired) optical axis. In fs-LASIK it is particularly important to adhere to the calculated
depth of focus and this is a particular application of the present invention.
In DE 10 2004 009 212 Al, an optical contact element for laser material processing is
presented. This contact element is used in the preferred embodiment for fs-LASIK. In this
case this contact element consists of a diffractive optical structure. These structures are
intended to minimize the incidence angles occurring due to high numerical apertures of the
lens. The diffractive optical element (DOE) consists here of a grating structure with radi-

ally adjusted grating period. The grating periods in this case are between 2001/mm and
5001/mm. Values in the μm range are indicated as spot sizes. Due to optical limits, only
one numerical aperture of approx. 0.3 is possible. Enlargement of the aperture is achieved
by using a second diffractive element in the beam path of the lens. This DOE is likewise
executed as a circular grating structure with a grating period that becomes larger towards
the optical axis. Achieving higher numerical apertures is indicated here as an advantage of
this execution. Furthermore, the contact element is executed curved. The radius of curvature
corresponds to the radius of curvature of the eye, approx. 8 mm. Material processing
is carried out with this uniformly preset radius of curvature. The suction attachment is
carried out similar to WO 03/002008 Al and EP 1 159 986 A2. Focus control is not carried
out with this presented method.
In EP 0 627 675 Al, a diffractive optical device is presented for the mapping of one or
more space points from a beam. Here the diffractive structure likewise consists of a segment-like
arrangement of arbitrary binary or multistage diffractive elements. The arrangement
can be a hexagonal or hexangular arrangement in particular. Thus mapping of a
light beam is achieved. However, only an intensity or/and phase transformation is undertaken.
In US 2002/0171028, an apparatus for focus control is described. Here the returning light
is brought by an imaging beam path to interference with a second bundle of rays and thus
interferometric wave control is carried out.
Focus control by means of interferometric wavefront control is carried out likewise in US
6,666,857 B2. The active wavefront control during the photoablation process on the human
eye is then achieved by a combination of adaptive mirrors. No active wavefront
control is to be undertaken.
In US 2004/0051976 Al, an optical arrangement of a confocal microscope, consisting of a
laser source emitting predominantly in the UV spectral range, a beam expander, a diffractive
pinhole array and an objective lens is described. A diffractive pinhole array is not

described in its exact embodiment. The increase in efficiency can be seen as one advantage
of this technical embodiment, as amplitude pinhole arrays have a typical transmission
of between 4% and 10% depending on the aperture ratio. With a diffractive pinhole array,
on the other hand, transmission values of such an optical element of up to 80% are possible,
dependence on the aperture ratio or the number of pinholes only being conditional on
the manufacturing here.
In US 2004/0021851, an optical arrangement consisting of a laser and subsequent beam
shaping optics is used to measure the focal length of an unknown lens. Measurement of
the focal length is carried out in this case by focusing on a reference surface at various
distances. The portion of the radiation that is reflected back is detected. The spot diameters
are then evaluated at the respective distances. The focal length is determined by
means of the "Newton's" relation Z Z'=f2. An optical grating, which is not described in
greater detail, is used to decouple the portion of the radiation reflected back. The Jones
matrix formalism is likewise drawn on to calculate the focal length. The accuracy of the
method is near 1%.
In US 6,909,546 B2, an optical arrangement consisting of a light source (Nd:YAG2w) and
subsequent beam shaping optics is described. In this case two diffractive optical elements
are used to homogenize the laser radiation. The first of the two DOEs is used here for
homogenization and spatial frequency filtering. A subsequent pinhole carries out the
spatial frequency filtering. Located inside the 2f system of spatial frequency filtering is the
second DOE, which produces the desired intensity distribution in the far field. The far
field is produced either by the field lens or by the 2nd DOE. The desired intensity distribution
is produced in the focus. Focus control is not carried out in this method.
The object of the invention accordingly is to provide an apparatus and a method with
which the focal position of an optical system can be determined precisely.
To this end the invention provides an apparatus for detecting the focal position of an optical
system with a radiation source, a focusing imaging system, an at least partially reflec-

tive surface on the focus, a suitable digital sensor system (e.g. CCD camera, CMOS camera
or the like) for recording an image that is reflected by said surface, a computer for
evaluating the image recorded by the camera, and an optical element in the beam path of
the optical system upstream of the focusing image system, which optical element influences
said image depending on the focal position.
In this case said focusing optical imaging system is preferably focusing optics with adjustable
(variable) focal position, thus in particular a system with which the location of the
focus is adjustable in a direction parallel to the optical axis of the image (thus the depth of
focus). In addition, in such a system the focal position is usually also adjustable in a direction
perpendicular to the optical axis of the radiation, e.g. in fs-LASIK.
The apparatus according to the invention and the corresponding method thus serve in
particular for the initial setting and alignment of an optical system such that immediately
prior to material processing in relation to a predetermined plane, the so-called surface, the
focus is adjusted precisely, in particular so that it lies exactly on this surface. When used
in LASIK, said null plane is preferably a surface that arises due to the fact that the cornea
is attached by suction in the area of interest to a reference surface (this is known as such to
the LASIK expert). The flattening disc, which is transparent for the radiation used, is
coated on its side facing the cornea and lying close to this such that a small percentage of
the incident radiation is reflected. This reflection then produces said image of the radiation
focused onto this null plane, which image is measured using said camera and evaluated.
In ideal focusing, the focus should therefore lie exactly on this null plane (thus
essentially on the flattened cornea surface in the example shown) and according to the
evaluation of the reflected image the optical system is then adjusted so that the focusing is
optimal, thus the position of the focus is exactly in this null plane. The optical system is
thus set and aligned and can be used for the subsequent material processing. In the subsequent
material processing the position of the focus is usually changed in relation to said
null plane. Thus in fs-LASIK, for example, when cutting the so-called flap the focus is
placed in the stroma and the focus positions are varied successively at right angles to the

optical axis to produce the flap. This is known as such. The initial setting of the system as
described above guarantees exact positioning of the foci at the desired target points.
In other material processing operations the null plane, which can also be described as the
reference plane, can be defined differently and does not necessarily have to coincide with
the surface of the material to be processed. The radiation focused onto the null plane and
the measurement of the image reflected in this plane supply calibration of the optical
system such that the setting of the optical imaging properties of the optical system for the
ideal state of focusing exactly in the null plane is known due to the image measurement, so
that then, starting out from these settings of the optical system, the focal position can be
changed according to the desired material processing, e.g. into the inside of the cornea.
According to one configuration, said optical element, which influences the focus image to
be measured depending on the focal position, is a diaphragm matrix (so-called pinhole
array).
The optical element can also be a so-called diffractive optical element (DOE), which
produces a dot pattern in the far field distribution (known as such to the person skilled in
the art and not explained in greater detail here).
Said optical element can be arranged in the beam path of the reflected image between the
reflective surface and the camera, or also outside this beam path. Advantages result in
each case according to the type of application.
The amplitude (intensity) or the phase (wavefront) of the reflected image can preferably be
influenced locally with the optical element and the defocus portions of the wavefront can
be rendered visible.
It is also possible to provide said optical element in the beam path both phase-sensitively
and amplitude-sensitively, in particular a combination thereof.

According to a preferred configuration, the optical element produces a dot pattern, in
particular a regular dot pattern in the form of a matrix.
The invention also provides a method for detecting the focal position of an optical system,
in which the radiation of a radiation source is mapped via a focusing imaging system in a
focal plane and wherein to determine the focal position of the optical system including the
imaging system an image is produced on the focus, which image is reflected there and is
recorded by a camera, wherein an optical element influences the recorded image depending
on the focusing of the radiation, and depending on said influencing of the image, information
about the focal position of the focused radiation at the envisaged focal point is derived.
Practical examples of the invention are described in greater detail below with reference to
the drawing.
Fig. 1 shows schematically a first practical example of an optical system with an apparatus
for detecting a focal position;
Fig. 2 shows a second practical example of an optical system with an apparatus for detecting
the focal position;
Fig. 3 shows schematically a practical example of an arrangement according to figure 2
with schematic representation of phase distributions of the radiation in the system and with
a hole matrix;
Fig. 4 shows a practical example of an arrangement according to figure 2 with a diffractive
optical element; and
Figs. 5, 6 show practical examples of images recorded by a camera with focusing mapping
in the manner of a hole matrix with exact focusing and/or focusing errors.

According to figure 1, an optical system 10 has a light source 12, which can be e.g. a laser
(such as an fs-laser, for example) or an LED etc. The radiation emitted by the light source
12 passes through an output mirror 14 and is focused via a focusing imaging system 16
onto a plane 18. The focusing imaging system 16 is only indicated schematically in the
figures by a single lens. Normally the focusing imaging system 16 has a plurality of
lenses, of which one or more can be actuated for setting and changing the focus. Such
optical imaging systems are known as such.
In figure 1, areas (points) are marked by the reference signs 20a and 20b at which an optical
element described in greater detail below is optionally to be positioned. Examples of
such optical elements are the optical elements 34 and 36 shown in figures 3 and 4.
Radiation reflected by the reflective surface 18 passes via the optical imaging system 16
and if applicable the optical element arranged in area 20a and described in further detail
below to the output mirror 14 and is deflected upwards from there in figure 1 via imaging
optics 22 to a digital camera 24, e.g. a so-called CCD camera with high local resolution.
The digital image recorded by the camera 24 is entered into a computer C and evaluated
there, as described in greater detail further below.
Figure 2 shows a modified practical example, with components and features having the
same or similar functions being provided with the same reference signs. In the example
according to figure 2, a beam expander (telescope) consisting of the optical elements 26,
28 is provided to expand the beam prior to its focusing with the imaging system 16. Instead
of the Keppler telescope shown in the figure, another beam shaping system can also
be used in its place. Generally the optical system designated a "beam expander" in figure
2 can also be a beam shaping system.
As already mentioned above, an optical element can be arranged in the areas 20a and/or
20b according to figures 1 and 2 that, depending on the more or less optimal focusing by
means of the imaging system 16 onto the reflective surface 18, influences the image described
above, which was produced by reflection and recorded by the camera 24, and so

facilitates a conclusion as to whether the focusing onto the plane corresponding to the
surface 18 is precisely that which is desired or whether the focal position is displaced in
relation to this plane, e.g. lies too far forward or too far back in the direction of the optical
axis (so-called depth of focus).
According to figure 3, a shadow mask 34 is arranged as an optical element in the present
sense in the beam path upstream of the focusing imaging system 16.
In the ideal case, the optical imaging system 16 is thus set such that the radiation coming
from the light source 12 is focused precisely in the plane 18 at a predetermined point. The
focus is marked in figure 3 by the reference sign 18a. The practical example according to
figure 3 corresponds to the example according to figure 2 with a beam expander in the area
indicated by reference sign 32. The phase distributions are also marked symbolically there
by reference signs 30a, 30b, 30c.
The optical element 34 is a hole matrix with N x M individual holes in the regular arrangement
shown. The optical element can be executed in this practical example as a pure
amplitude-related element, thus influencing intensities of the radiation. Typical hole diameters
in the shadow mask lie between 1 μm and 100 μm. The holes can be in particular
hexangular, square, hexagonal or also circular. The arrangement of the individual holes is
oriented to the beam profile used and the requirements in respect of accuracy with regard
to the focal position. With the system described, focal positions can be determined accurate
to a few μm. Since the radiation on the path to the plane 18 and the image reflected in
the plane 18 each pass through the optical element 34, the image measured by the camera
24 is influenced depending on the accuracy of the focusing in the plane 18. A change in
the focal position in relation to the plane 18 (which is the null plane defined above) of a
few micrometres can be detected by evaluation of the image recorded by the camera 24 in
the computer C.
It is also possible to determine the radiation output occurring in the focus by integration of
the intensities measured by the camera 24 at the individual image points.

Fig. 5 shows, by way of example and schematically, reflection images obtained and evaluated
in this manner. In this case figure 5 shows in the middle the matrix-like hole image
obtained in the event that the optical system including the focusing imaging system 16 is
set such that the focusing lies exactly on the desired point in the null plane 18. As stated,
the reflective surface for producing the measured image also lies in this plane 18. As the
hole image in figure 5, middle, shows, in the reflected image the individual holes are
illuminated entirely homogeneously without a spherical portion, according to the input
beam profile.
In the left-hand hole image, figure 5 shows a displacement of the focal position backwards
by approx. 100 μm in relation to the null plane 18. Compared with exact focusing (figure
5, middle), the image evaluation yields a modification of the individual image dots in the
matrix and the computer C is calibrated for the evaluation such that it "recognizes" this
deviation. The calibration of the computer can take place e.g. experimentally in such a
way that using a known optical imaging system changes in the reflected image produced
are recorded and stored specifically depending on the focal position, so that then the focal
position can be determined by comparison with actually measured images.
On the right, figure 5 shows defocusing by -100 μm with a lens focal length of 50 mm
with corresponding modification of the hole image compared with ideal focusing. Generally
speaking, the asymmetry of the image, as shown to the left and right in figure 5, permits
analysis of the focusing. If, on the basis of image evaluation using the computer C,
this analysis results in an asymmetrical brightness distribution in the image, then elements
of the focusing imaging system 16 can be changed until the image evaluation shows that
the focus lies exactly in the plane 18.
Figure 4 shows a practical example of the apparatus for detecting the focal position of an
optical system 10, in which the optical element is arranged in area 20b in the practical
example according to figure 2, thus in such a way that the image reflected on the plane 18
does not pass through the optical element 36 on its way to the camera 24.

The optical element 36 in this case is a diffractive optical element (DOE), which forms e.g.
a "1 to N" beam splitter, thus splits an incident single beam into N single beams, wherein
N can vary e.g. between 2 and 50. The divergence caused by the diffractive element 36
can be corrected refractively or diffractively by a second structure (not shown). Several
diffractive optical elements can also be arranged one behind another, depending on the
beam profile and desired analysis. An advantage of an arrangement with diffractive optical
elements is the possibility of correction of the incident phase distribution. The phase
distribution can be influenced by both the light source and the following optical elements,
thus in particular the beam expander. In this practical example also, analogous to the
description with reference to figure 3, the image reflected in the plane 18 is recorded by
the camera 24 and evaluated in the computer C. Figure 6 shows three images recorded by
the camera 24 in the event that the diffractive optical element produces a matrix-like radiation
distribution, wherein the image on the right in figure 6 shows the case of ideal focusing
with relatively uniform illumination of the individual image dots. In figure 6, left, the
case is shown in which the focal position deviates laterally from the ideal imaging point
18a, to be precise by several hundred micrometres. The individual image dots are illuminated
asymmetrically. Figure 6, middle, shows a focal position displaced laterally in
another direction, wherein the individual matrix-like light dots are likewise illuminated
less symmetrically than in the case of ideal focusing according to the image in figure 6,
right.
An optical element 36 in the form of a DOE has the advantage compared with a hole matrix
of high transmission. With a diffractive element, efficiency of between 80 and 90%
can typically be achieved. Such an arrangement also facilitates very high dynamics in the
evaluation of the focal position, i.e. deviations of the focus from the ideal target position
can be established over a wide range.
It is also possible to arrange the diffractive optical element 36 in the areas 20a according to
figures 1 and 2.

The diffractive optical element can also be executed as a binary element or also as a so-
called multi-level grating structure. The grating structures can be one-dimensional or also
two-dimensional.
If an arrangement according to figures 1, 2, 3 or 4 is used in fs-LASIK, then the reflective
surface 18, which defines the null plane explained above, can be e.g. the rear of a transparent
disc in a suction apparatus known as such, which is constructed (coated or uncoated)
such that a small percentage of the incident radiation is reflected to obtain the image to be
recorded by the camera 24.
The following are used in particular as diffractive optical elements: gratings, Fresnel zone
lenses, so-called beam-shaping elements etc. So-called refractive optical components can
also be used as element (36): e.g. micro-lens arrays, beam-shaping elements etc. If the
optical element 34 is used for amplitude analysis, then shadow masks or also arrangements
of holes in any geometry such as square, hexangular, hexagonal etc. are particularly suitable,
depending on the beam type and analysis aim.
The optical element can also be formed as a slot or as an arrangement of several slots.
Using the arrangements described, not only can the focal position be determined and controlled,
but beam divergences, laser outputs, deviations of the radiation from the optical
axis, deviations in the so-called beam product M2 or changes in the output beam profile of
the light source 12 can also be detected, since all these beam parameters can have an influence
on the reflected image recorded by the camera 24. With regard to all these beam
parameters the computer C can be provided experimentally beforehand with a database
through targeted trials, which database assigns deviations from the ideal target values, each
of which correspond to image alterations, to individual beam parameters, so that the system
is adjustable to ideal values by intervention with corresponding correcting variables.
The use of diffractive optical elements here facilitates compensation of any phase alterations
possibly occurring in the beam path that can also influence the focal position. The
Hartmann Shack sensor, known as such, does not facilitate such an analysis.

We Claim :
1. Apparatus for detecting the focal position of an optical system (10) with a radiation
source (12), a focusing imaging system (16), an at least partially reflective surface (18) on
the focus (18a), a digital sensor system (24) for recording an image reflected by said surface
(18), a computer (C) for evaluating the image recorded by the digital sensor system
(24), and with an optical element (34; 36) in the beam path of the optical system (10)
upstream of the focusing imaging system (16), characterized in that the optical system (10)
is a LASIK arrangement and that the optical element (34; 36) in the beam path influences
the phase or amplitude of said image depending on the focal position, wherein the partially
reflective surface (18) reflects a small percentage of the incident radiation to obtain the
image to be recorded using the digital sensor system.
2. Apparatus according to claim 1, characterized in that the optical element (34; 36) is
a hole matrix.
3. Apparatus according to claim 1, characterized in that the optical element (34; 36) is
a diffractive optical element.
4. Apparatus according to one of the preceding claims, characterized in that the optical
element (34) is arranged in the beam path of said reflected image.
5. Apparatus according to one of claims 1 to 3, characterized in that the optical element
(36) is arranged outside the beam path of the reflected image.
6. Apparatus according to one of the preceding claims, characterized in that the optical
element (34; 36) has a grating structure.
7. Apparatus according to claim 3, characterized in that the diffractive optical element
(34; 36) produces a dot pattern, in particular a dot pattern in the form of a matrix.

8. Apparatus according to one of the preceding claims, characterized in that the radiation
source (12) is an fs-laser.
9. Apparatus according to one of the preceding claims with means for setting the
imaging of the optical system (10) depending on the evaluation of the computer.
10. Method for detecting the focal position of an optical system (10) immediately prior
to material processing, in which the radiation of a radiation source (12) is mapped via a
focusing imaging system (16) in a focal plane (18) and wherein to determine the focal
position of an optical system including the imaging system (16) by means of an optical
element (34; 36) in the beam path an image is produced on the focus (18a), which is reflected
there and is recorded by a camera (24), wherein said optical element (34; 36) influences
the image recorded depending on the focusing of the radiation and wherein
depending on said influencing of the image a conclusion is derived about the focal position
of the focused radiation in relation to an envisaged focal point (18a), characterized in that
by means of the optical element (34; 36) the phase or amplitude of the image is influenced
depending on the focal position and that the optical system is a LASIK arrangement,
wherein the partially reflective surface (18) reflects a small percentage of the incident
radiation to obtain the image to be recorded using the digital sensor system.
11. Method according to claim 10, wherein by means of said derived conclusion about
the focal position an optical element of the optical system (10) is set to change the focal
position.
12. Apparatus for carrying out an ophthalmological treatment or diagnosis with femtosecond
laser radiation using an apparatus according to one of claims 1 to 9.

An apparatus and a method are presented for detecting the focal position of an optical
system (10) with a radiation source (12), a focusing imaging system (16), an at least partially reflective surface (18) on the focus (18a), a digital camera (24) for recording an
image reflected by said surface (18), a computer (C) for evaluating the image recorded by the camera (24), and with an optical element (34; 36) in the beam path of the optical system
(10) upstream of the focusing imaging system (16), which element influences said image depending on the focal position.

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Patent Number

272016

Indian Patent Application Number

3733/KOLNP/2008

PG Journal Number

12/2016

Publication Date

18-Mar-2016

Grant Date

14-Mar-2016

Date of Filing

12-Sep-2008

Name of Patentee

WAVELIGHT GMBH

Applicant Address

AM WOLFSMANTEL 5, 91058 ERLANGEN

Inventors:

#	Inventor's Name	Inventor's Address
1	TRIEBEL, PETER	FALKENWEG 2, 07751 JENA
2	KITTELMANN, OLAF	LINDENTHALER ALLEE 26, 14163 BERLIN

PCT International Classification Number

A61F 9/01,B23K 26/04

PCT International Application Number

PCT/EP2007/001456

PCT International Filing date

2007-02-20

PCT Conventions:

#	PCT Application Number	Date of Convention	Priority Country
1	10 2006 007 750.4	2006-02-20	Germany